Interaction between a cMUT cell and a liquid medium around the parallel resonance frequency
IEEE Ultrasonics Symposium Proceedings, 2007
2151 - 2154
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In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.
Capacitive micromachined ultrasonic transducer