Interaction between a cMUT cell and a liquid medium around the parallel resonance frequency
Date
2007-10Source Title
IEEE Ultrasonics Symposium Proceedings, 2007
Print ISSN
1051-0117
Publisher
IEEE
Pages
2151 - 2154
Language
English
Type
Conference PaperItem Usage Stats
130
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Abstract
In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.
Keywords
Cell membranesElectroacoustic transducers
Flow interactions
Natural frequencies
Ultrasonic transducers
Ultrasonics
Average velocity
Capacitive micromachined ultrasonic transducer
Immersion medium
Liquid mediums
Parallel resonance
Parametric modeling
Zero energy
Resonance