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      Interaction between a cMUT cell and a liquid medium around the parallel resonance frequency

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      Author(s)
      Şenlik, Muhammed N.
      Atalar, Abdullah
      Olçum, Selim
      Date
      2007-10
      Source Title
      IEEE Ultrasonics Symposium Proceedings, 2007
      Print ISSN
      1051-0117
      Publisher
      IEEE
      Pages
      2151 - 2154
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      In this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.
      Keywords
      Cell membranes
      Electroacoustic transducers
      Flow interactions
      Natural frequencies
      Ultrasonic transducers
      Ultrasonics
      Average velocity
      Capacitive micromachined ultrasonic transducer
      Immersion medium
      Liquid mediums
      Parallel resonance
      Parametric modeling
      Zero energy
      Resonance
      Permalink
      http://hdl.handle.net/11693/27068
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2007.541
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      • Department of Electrical and Electronics Engineering 3702
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