Experimental characterization of capacitive micromachined ultrasonic transducers
Date
2007
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Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Source Title
Proceedings of the Ultrasonics Symposium, IEEE 2007
Publisher
IEEE
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Keywords
Capacitive micromachined ultrasonic transducers, cMUT, Electroacoustic transducers, Experiments, Flow of fluids, Micromachining, Optical design, Transducers, Ultrasonic equipment, Ultrasonic measurement, Ultrasonic waves, Ultrasonics, Experimental characterization, Fabricated devices, Pitch-catch, Pulse echoes, Surface micromachining processes, Testing procedures, Ultrasonic transducers
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Language
English
Type
Conference Paper