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      • Department of Electrical and Electronics Engineering
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      Experimental characterization of capacitive micromachined ultrasonic transducers

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      Author
      Ölçüm, Selim
      Atalar, Abdullah
      Köymen, Hayrettin
      Oğuz, Kağan
      Şenlik, Muhammed N.
      Date
      2007
      Source Title
      Proceedings of the Ultrasonics Symposium, IEEE 2007
      Print ISSN
      1051-0117
      Publisher
      IEEE
      Pages
      2131 - 2134
      Language
      English
      Type
      Conference Paper
      Item Usage Stats
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      Abstract
      In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
      Keywords
      Capacitive micromachined ultrasonic transducers
      cMUT
      Electroacoustic transducers
      Experiments
      Flow of fluids
      Micromachining
      Optical design
      Transducers
      Ultrasonic equipment
      Ultrasonic measurement
      Ultrasonic waves
      Ultrasonics
      Experimental characterization
      Fabricated devices
      Pitch-catch
      Pulse echoes
      Surface micromachining processes
      Testing procedures
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/27017
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/ULTSYM.2007.536
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      • Department of Electrical and Electronics Engineering 3524
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