Experimental characterization of capacitive micromachined ultrasonic transducers
Şenlik, Muhammed N.
Proceedings of the Ultrasonics Symposium, IEEE 2007
2131 - 2134
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In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
KeywordsCapacitive micromachined ultrasonic transducers
Flow of fluids
Surface micromachining processes
Published Version (Please cite this version)http://dx.doi.org/10.1109/ULTSYM.2007.536
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