Experimental characterization of capacitive micromachined ultrasonic transducers
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Date
2007Journal Title
Proceedings - IEEE Ultrasonics Symposium
ISSN
10510117
Pages
2131 - 2134
Language
English
Type
Conference Paper
Metadata
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http://hdl.handle.net/11693/27017Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers. © 2007 IEEE.
Published as
http://dx.doi.org/10.1109/ULTSYM.2007.536Collections
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