Experimental characterization of capacitive micromachined ultrasonic transducers
Date
2007Source Title
Proceedings of the Ultrasonics Symposium, IEEE 2007
Print ISSN
1051-0117
Publisher
IEEE
Pages
2131 - 2134
Language
English
Type
Conference PaperItem Usage Stats
142
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Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
Keywords
Capacitive micromachined ultrasonic transducerscMUT
Electroacoustic transducers
Experiments
Flow of fluids
Micromachining
Optical design
Transducers
Ultrasonic equipment
Ultrasonic measurement
Ultrasonic waves
Ultrasonics
Experimental characterization
Fabricated devices
Pitch-catch
Pulse echoes
Surface micromachining processes
Testing procedures
Ultrasonic transducers
Permalink
http://hdl.handle.net/11693/27017Published Version (Please cite this version)
http://dx.doi.org/10.1109/ULTSYM.2007.536Collections
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