Experimental characterization of capacitive micromachined ultrasonic transducers
Proceedings of the Ultrasonics Symposium, IEEE 2007
2131 - 2134
Item Usage Stats
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
KeywordsCapacitive micromachined ultrasonic transducers
Flow of fluids
Surface micromachining processes
Published Version (Please cite this version)http://dx.doi.org/10.1109/ULTSYM.2007.536
Showing items related by title, author, creator and subject.
Olcum, Selim; Oǧuz, Kaan; Şenlik, Muhammed N.; Yamaner F. Y.; Bozkurt, A.; Atalar, Abdullah; Köymen, Hayrettin (IEEE, 2009-09)In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...
Senlik, M. N.; Olcum, S.; Köymen, Hayrettin; Atalar, Abdullah (IEEE, 2010)The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency ...
Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers in collapsed state Özgürlük, Alper; Atalar, Abdullah; Köymen, Hayrettin; Olcum, Selim (IEEE, 2011-10)Radiation impedance is one of the important parameters in designing efficient and wideband capacitive micro-machined ultrasonic transducer (CMUT) arrays. It determines how much acoustical power is generated in the surrounding ...