Silicon nanoparticle charge trapping memory cell
Okyay, A., K.
Please cite this item using this persistent URLhttp://hdl.handle.net/11693/26534
Physica Status Solidi - Rapid Research Letters
- Research Paper 
A charge trapping memory with 2 nm silicon nanoparticles (Si NPs) is demonstrated. A zinc oxide (ZnO) active layer is deposited by atomic layer deposition (ALD), preceded by Al2O3 which acts as the gate, blocking and tunneling oxide. Spin coating technique is used to deposit Si NPs across the sample between Al2O3 steps. The Si nanoparticle memory exhibits a threshold voltage (Vt) shift of 2.9 V at a negative programming voltage of -10 V indicating that holes are emitted from channel to charge trapping layer. The negligible measured Vt shift without the nanoparticles and the good re- tention of charges (>10 years) with Si NPs confirm that the Si NPs act as deep energy states within the bandgap of the Al2O3 layer. In order to determine the mechanism for hole emission, we study the effect of the electric field across the tunnel oxide on the magnitude and trend of the Vt shift. The Vt shift is only achieved at electric fields above 1 MV/cm. This high field indicates that tunneling is the main mechanism. More specifically, phonon-assisted tunneling (PAT) dominates at electric fields between 1.2 MV/cm < E < 2.1 MV/cm, while Fowler-Nordheim tunneling leads at higher fields (E > 2.1 MV/cm). © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Showing items related by title, author, creator and subject.
Suzer, S.; Baer, D.R.; Engelhard, M.H. (2010)The impact of solution exposure on the charging properties of oxide coatings on Fe metal-core oxide-shell nanoparticles has been examined by sample biasing during XPS measurements. The Fe nanoparticles were suspended in ...
Zeta potential: A surface electrical characteristic to probe the interaction of nanoparticles with normal and cancer human breast epithelial cells Zhang, Y.; Yang, M.; Portney, N.G.; Cui, D.; Budak G.; Ozbay, E.; Ozkan, M.; Ozkan, C.S. (2008)We demonstrate the use of surface Zeta potential measurements as a new tool to investigate the interactions of iron oxide nanoparticles and cowpea mosaic virus (CPMV) nanoparticles with human normal breast epithelial cells ...
Memory effect by charging of ultra-small 2-nm laser-synthesized solution processable Si-nanoparticles embedded in Si-Al<inf>2</inf>O<inf>3</inf>-SiO<inf>2</inf> structure El-Atab, N.; Rizk, A.; Tekcan, B.; Alkis, S.; Okyay, A., K.; Nayfeh, A. (Wiley-VCH Verlag, 2015)A memory structure containing ultra-small 2-nm laser-synthesized silicon nanoparticles is demonstrated. The Si-nanoparticles are embedded between an atomic layer deposited high-κ dielectric Al<inf>2</inf>O<inf>3</inf> layer ...