A new detection method for capacitive micromachined ultrasonic transducers
Proceedings of the IEEE Ultrasonics Symposium
1007 - 1010
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Capacitive micromachined ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They usually consist of many small membranes all in parallel. In this work we report a new detection method for cMUT's. We arrange the membranes in the form of an artificial transmission line by inserting small inductances between the membranes. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the total capacitance and the frequency of the signal through it. By measuring the electrical length of the artificial line at a RF frequency in the GHz range, the vibrations of the membranes can be detected in a very sensitive manner. For the detector structure we considered a minimum detectable displacement in the order of 10-7 angstroms/√Hz is expected.
Capacitive micromachined ultrasonic transducers (cMUT)
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Olcum, Selim; Oǧuz, Kaan; Şenlik, Muhammed N.; Yamaner F. Y.; Bozkurt, A.; Atalar, Abdullah; Köymen, Hayrettin (IEEE, 2009-09)In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...
Senlik, M. N.; Olcum, S.; Köymen, Hayrettin; Atalar, Abdullah (IEEE, 2010)The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency ...
Ölçüm, Selim; Atalar, Abdullah; Köymen, Hayrettin; Oğuz, Kağan; Şenlik, Muhammed N. (IEEE, 2007)In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive ...