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      A new detection method for capacitive micromachined ultrasonic transducers

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      Author(s)
      Ergun, A. S.
      Temelkuran, B.
      Özbay, Ekmel
      Atalar, Abdullah
      Date
      1998
      Source Title
      Proceedings of the IEEE Ultrasonics Symposium
      Print ISSN
      1051-0117
      Publisher
      IEEE
      Volume
      2
      Pages
      1007 - 1010
      Language
      English
      Type
      Article
      Item Usage Stats
      201
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      196
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      Abstract
      Capacitive micromachined ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They usually consist of many small membranes all in parallel. In this work we report a new detection method for cMUT's. We arrange the membranes in the form of an artificial transmission line by inserting small inductances between the membranes. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the total capacitance and the frequency of the signal through it. By measuring the electrical length of the artificial line at a RF frequency in the GHz range, the vibrations of the membranes can be detected in a very sensitive manner. For the detector structure we considered a minimum detectable displacement in the order of 10-7 angstroms/√Hz is expected.
      Keywords
      Capacitance
      Capacitors
      Nondestructive examination
      Ultrasonic measurement
      Ultrasonic testing
      Vibrations (mechanical)
      Capacitive micromachined ultrasonic transducers (cMUT)
      Displacement sensing
      Ultrasonic detection
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/25384
      Collections
      • Department of Electrical and Electronics Engineering 4012
      • Department of Physics 2551
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