Show simple item record

dc.contributor.authorErgun, A. S.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorTemelkuran, B.en_US
dc.contributor.authorÖzbay, Ekmelen_US
dc.date.accessioned2016-02-08T10:43:48Z
dc.date.available2016-02-08T10:43:48Z
dc.date.issued1998-06-08en_US
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/25382
dc.description.abstractWe report a sensitive detection method for capacitive ultrasonic transducers. Detection experiments at 1.6 MHz reveal a minimum detectable displacement around 2.5×10-4Å/ Hz. The devices are fabricated on silicon using surface micromachining techniques. We made use of microwave circuit considerations to obtain a good displacement sensitivity. Our method also eliminates the dependence of the sensitivity on the ultrasound frequency, allowing the method to be used at low audio frequency and static displacement sensing applications. © 1998 American Institute of Physics.en_US
dc.language.isoEnglishen_US
dc.source.titleApplied Physics Lettersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.121506en_US
dc.titleA sensitive detection method for capacitive ultrasonic transducersen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentDepartment of Physicsen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.citation.spage2957en_US
dc.citation.epage2959en_US
dc.citation.volumeNumber72en_US
dc.citation.issueNumber23en_US
dc.identifier.doi10.1063/1.121506en_US
dc.publisherAmerican Institute of Physicsen_US
dc.contributor.bilkentauthorÖzbay, Ekmel
buir.contributor.orcidÖzbay, Ekmel|0000-0003-2953-1828en_US


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record