| dc.contributor.author | Ergun, A. S. | en_US |
| dc.contributor.author | Atalar, Abdullah | en_US |
| dc.contributor.author | Temelkuran, B. | en_US |
| dc.contributor.author | Özbay, Ekmel | en_US |
| dc.date.accessioned | 2016-02-08T10:43:48Z | |
| dc.date.available | 2016-02-08T10:43:48Z | |
| dc.date.issued | 1998-06-08 | en_US |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | http://hdl.handle.net/11693/25382 | |
| dc.description.abstract | We report a sensitive detection method for capacitive ultrasonic transducers. Detection experiments at 1.6 MHz reveal a minimum detectable displacement around 2.5×10-4Å/ Hz. The devices are fabricated on silicon using surface micromachining techniques. We made use of microwave circuit considerations to obtain a good displacement sensitivity. Our method also eliminates the dependence of the sensitivity on the ultrasound frequency, allowing the method to be used at low audio frequency and static displacement sensing applications. © 1998 American Institute of Physics. | en_US |
| dc.language.iso | English | en_US |
| dc.source.title | Applied Physics Letters | en_US |
| dc.relation.isversionof | http://dx.doi.org/10.1063/1.121506 | en_US |
| dc.title | A sensitive detection method for capacitive ultrasonic transducers | en_US |
| dc.type | Article | en_US |
| dc.department | Department of Electrical and Electronics Engineering | en_US |
| dc.department | Department of Physics | en_US |
| dc.department | Institute of Materials Science and Nanotechnology (UNAM) | en_US |
| dc.citation.spage | 2957 | en_US |
| dc.citation.epage | 2959 | en_US |
| dc.citation.volumeNumber | 72 | en_US |
| dc.citation.issueNumber | 23 | en_US |
| dc.identifier.doi | 10.1063/1.121506 | en_US |
| dc.publisher | American Institute of Physics | en_US |
| dc.contributor.bilkentauthor | Özbay, Ekmel | |
| buir.contributor.orcid | Özbay, Ekmel|0000-0003-2953-1828 | en_US |
