• About
  • Policies
  • What is open access
  • Library
  • Contact
Advanced search
      View Item 
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.

      Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers

      Thumbnail
      View / Download
      262.1 Kb
      Author(s)
      Bozkurt, A.
      Degertekin, F. L.
      Atalar, Abdullah
      Khuri-Yakub, B. T.
      Date
      1998
      Source Title
      Proceedings of the IEEE Ultrasonics Symposium
      Print ISSN
      1051-0117
      Publisher
      IEEE, Piscataway, NJ, United States
      Volume
      2
      Pages
      1025 - 1028
      Language
      English
      Type
      Article
      Item Usage Stats
      254
      views
      252
      downloads
      Abstract
      The structural loss mechanism of capacitive micromachined ultrasonic transducer (cMUT) is investigated using finite element analysis and the normal mode theory. A single micromachined transducer membrane on an infinite silicon substrate is simulated by incorporating absorbing boundary conditions in the finite element method. This enables direct evaluation of the mechanical impedance of the membrane. Furthermore, the field distribution along the thickness of the silicon substrate due to outward radiating wave modes is obtained. The normal mode theory is applied to extract the contributions of different wave modes to the complicated field distributions. It is found that, the lowest order Lamb wave modes are responsible for the loss. Evaluation of absolute and relative power losses due to individual modes indicate that the lowest order anti-symmetric (A0) mode is the dominant radial mode in agreement with experimental measurements. The results of the analysis are used to derive a detailed equivalent circuit model of a cMUT with structural loss.
      Keywords
      Boundary conditions
      Capacitors
      Computer simulation
      Electric fields
      Electric losses
      Equivalent circuits
      Finite element method
      Mathematical models
      Silicon sensors
      Capacitive micromachined ultrasonic transducers (CMUT)
      Cross coupling
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/25332
      Published Version (Please cite this version)
      http://doi.org/10.1109/ULTSYM.1998.764979
      Collections
      • Department of Electrical and Electronics Engineering 3868
      Show full item record

      Browse

      All of BUIRCommunities & CollectionsTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsCoursesThis CollectionTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsCourses

      My Account

      Login

      Statistics

      View Usage StatisticsView Google Analytics Statistics

      Bilkent University

      If you have trouble accessing this page and need to request an alternate format, contact the site administrator. Phone: (312) 290 2976
      © Bilkent University - Library IT

      Contact Us | Send Feedback | Off-Campus Access | Admin | Privacy