High-speed high-efficiency resonant cavity enhanced photodiodes
Ünlü, M. S.
Mirin, R. P.
Bertness, K. A.
Christensen, D. H.
Proceedings of SPIE - The International Society for Optical Engineering
Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, United States
298 - 306
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In this paper, we review our research efforts on RCE high-speed high-efficiency p-i-n and Schottky photodiodes. Using a microwave compatible planar fabrication process, we have designed and fabricated GaAs based RCE photodiodes. For RCE Schottky photodiodes, we have achieved a peak quantum efficiency of 50% along with a 3-dB bandwidth of 100 GHz. The tunability of the detectors via a recess etch is also demonstrated. For p-i-n type photodiodes, we have fabricated and tested widely tunable devices with near 100% quantum efficiencies, along with a 3-dB bandwidth of 50 GHz. Both of these results correspond to the fastest RCE photodetectors published in scientific literature.
KeywordsHigh speed photodetectors
Resonant cavity enhancement