• About
  • Policies
  • What is open access
  • Library
  • Contact
Advanced search
      View Item 
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.

      Designing transmitting CMUT cells for airborne applications

      Thumbnail
      View / Download
      2.0 Mb
      Author(s)
      Ünlügedik, A.
      Taşdelen, A.
      Atalar, Abdullah
      Köymen, Hayrettin
      Date
      2014
      Source Title
      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
      Print ISSN
      0885-3010
      Publisher
      Institute of Electrical and Electronics Engineers Inc.
      Volume
      61
      Issue
      11
      Pages
      1899 - 1910
      Language
      English
      Type
      Article
      Item Usage Stats
      292
      views
      261
      downloads
      Abstract
      We report a new mode of airborne operation for capacitive micromachined ultrasonic transducers (CMUT), in which the plate motion spans the entire gap without collapsing and the transducer is driven by a sinusoidal voltage without a dc bias. We present equivalent-circuit-based design fundamentals for an airborne CMUT cell and verify the design targets using fabricated CMUTs. The performance limits for silicon plates are derived. We experimentally obtain 78.9 dB//20 μPa@1 m source level at 73.7 kHz, with a CMUT cell of radius 2.05 mm driven by 71 V sinusoidal drive voltage at half the frequency. The measured quality factor is 120. We also study and discuss the interaction of the nonlinear transduction force and the nonlinearity of the plate compliance. © 1986-2012 IEEE.
      Keywords
      Transducers
      Airborne applications
      Capacitive micromachined ultrasonic transducer
      Nonlinear transduction
      Performance limits
      Quality factors
      Silicon plates
      Sinusoidal voltage
      Sinusoidal-drive voltage
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/25102
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/TUFFC.2014.006457
      Collections
      • Acoustics and Underwater Technologies Research Center (BASTA) 7
      • Department of Electrical and Electronics Engineering 3868
      Show full item record

      Browse

      All of BUIRCommunities & CollectionsTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsCoursesThis CollectionTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsCourses

      My Account

      Login

      Statistics

      View Usage StatisticsView Google Analytics Statistics

      Bilkent University

      If you have trouble accessing this page and need to request an alternate format, contact the site administrator. Phone: (312) 290 2976
      © Bilkent University - Library IT

      Contact Us | Send Feedback | Off-Campus Access | Admin | Privacy