Controlled photoluminescence in amorphous-silicon-nitride microcavities
Applied Physics Letters
1388 - 1390
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Narrow-band and enhanced photoluminescence have been observed in hydrogenated amorphous-silicon-nitride microcavities. The distributed Bragg reflectors were fabricated using alternating layers of hydrogenated amorphous-silicon nitride and hydrogenated amorphous-silicon oxide. The microcavity resonance wavelength was designed to be at the maximum of the bulk hydrogenated amorphous-silicon-nitride luminescence spectrum. At the microcavity resonance, the phololuminescence amplitude is enhanced, while the photoluminescence linewidth is reduced with respect to the bulk hydrogenated amorphous-silicon nitride. © 2001 American Institute of Physics.