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      A new detection method for capacitive micromachine ultrasonic transducers

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      Author(s)
      Ergun, A. S.
      Temelkuran, B.
      Özbay, Ekmel
      Atalar, Abdullah
      Date
      2001
      Source Title
      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
      Print ISSN
      0885-3010
      Publisher
      IEEE
      Volume
      48
      Issue
      4
      Pages
      932 - 942
      Language
      English
      Type
      Article
      Item Usage Stats
      222
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      201
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      Abstract
      Capacitive micromachine ultrasonic transducers (cMUT) have become an alternative to piezoelectric transducers in the past few years. They consist of many small circular membranes that are connected in parallel. In this work, we report a new detection method for cMUTs. We model the membranes as capacitors and the interconnections between the membranes as inductors. This kind of LC network is called an artificial transmission line. The vibrations of the membranes modulate the electrical length of the transmission line, which is proportional to the frequency of the signal through it. By measuring the electrical length of the artificial line at a high RF frequency (in the gigahertz range), the vibrations of the membranes can be detected in a very sensitive manner. For the devices we measured, we calculated the minimum detectable displacement to be in the order of 10 -5 Å/√Hz with a possible improvement to 10 -7 Å/√Hz.
      Keywords
      Capacitive micromachined ultrasonic transducers
      Electrical length
      Ultrasound frequency
      Capacitance
      Capacitors
      Demodulation
      Electric inductors
      Electric variables measurement
      Electrodes
      Mathematical models
      Signal detection
      Ultrasonics
      Vibrations (mechanical)
      Ultrasonic transducers
      Permalink
      http://hdl.handle.net/11693/24843
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/58.935710
      Collections
      • Department of Electrical and Electronics Engineering 4012
      • Department of Physics 2551
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