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      Integrated micro ring resonator displacement sensor for scanning probe microscopies

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      Author(s)
      Kiyat, I.
      Kocabas, C.
      Aydınlı, Atilla
      Date
      2004
      Source Title
      Journal of Micromechanics and Microengineering
      Print ISSN
      0960-1317
      Electronic ISSN
      1361-6439
      Publisher
      Institute of Physics Publishing
      Volume
      14
      Issue
      3
      Pages
      374 - 381
      Language
      English
      Type
      Article
      Item Usage Stats
      206
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      Abstract
      We describe a novel displacement sensor for scanning probe microscopies using an integrated optical micro ring resonator. This device operates by means of monitoring the changes in the transmission spectrum of a high finesse micro ring resonator. Finite element method simulations were carried out to obtain the optimum sensor design and finite difference time domain simulation was used to obtain the transfer characteristics of micro ring resonators. Operation principles and sensitivity calculations are discussed in detail. To achieve high sensitivity, we have studied different types of ring resonator. The highest sensitivity is obtained in a race-track resonator. This new design should provide sensitivities as high as ∼10 -4 Å -1.
      Keywords
      Micro ring resonators
      Scanning probe microscopies
      Atomic force microscopy
      Computer simulation
      Finite element method
      Interferometry
      Optical resonators
      Optical waveguides
      Refractive index
      Sensitivity analysis
      Time domain analysis
      Ultrahigh vacuum
      Sensors
      Permalink
      http://hdl.handle.net/11693/24315
      Published Version (Please cite this version)
      http://dx.doi.org/10.1088/0960-1317/14/3/009
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      • Department of Physics 2550
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