Integrated micro ring resonator displacement sensor for scanning probe microscopies
Date
2004Source Title
Journal of Micromechanics and Microengineering
Print ISSN
0960-1317
Electronic ISSN
1361-6439
Publisher
Institute of Physics Publishing
Volume
14
Issue
3
Pages
374 - 381
Language
English
Type
ArticleItem Usage Stats
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Abstract
We describe a novel displacement sensor for scanning probe microscopies using an integrated optical micro ring resonator. This device operates by means of monitoring the changes in the transmission spectrum of a high finesse micro ring resonator. Finite element method simulations were carried out to obtain the optimum sensor design and finite difference time domain simulation was used to obtain the transfer characteristics of micro ring resonators. Operation principles and sensitivity calculations are discussed in detail. To achieve high sensitivity, we have studied different types of ring resonator. The highest sensitivity is obtained in a race-track resonator. This new design should provide sensitivities as high as ∼10 -4 Å -1.
Keywords
Micro ring resonatorsScanning probe microscopies
Atomic force microscopy
Computer simulation
Finite element method
Interferometry
Optical resonators
Optical waveguides
Refractive index
Sensitivity analysis
Time domain analysis
Ultrahigh vacuum
Sensors