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      Modeling the effect of subsurface interface defects on contact stiffness for ultrasonic atomic force microscopy

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      Author
      Sarioglu, A. F.
      Atalar, Abdullah
      Degertekin, F. L.
      Date
      2004
      Source Title
      Applied Physics Letters
      Print ISSN
      0003-6951
      Electronic ISSN
      1077-3118
      Publisher
      AIP Publishing LLC
      Volume
      84
      Issue
      26
      Pages
      5368 - 5370
      Language
      English
      Type
      Article
      Item Usage Stats
      115
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      120
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      Abstract
      We present a model predicting the effects of mechanical defects at layer interfaces on the contact stiffness measured by ultrasonic atomic force microscopy sAFMd. Defects at subsurface interfaces result in changes at the local contact stiffness between the AFM tip and the sample. Surface impedance method is employed to model the imperfections and an iterative algorithm is used to calculate the AFM tip-surface contact stiffness. The sensitivity of AFM to voids or delaminations and disbonds is investigated for film-substrate combinations commonly used in microelectronic structures, and optimum defect depth for maximum sensitivity is defined. The effect of contact force and the tip properties on the defect sensitivity are considered. The results indicate that the ultrasonic AFM should be suitable for subsurface detection and its defect sensitivity can be enhanced by adjusting the applied force as well as by judicious choice of the AFM tip material and geometry.
      Keywords
      Disbonds
      Subsurface detection
      Subsurface interface
      Surface impedance
      Algorithms
      Atomic force microscopy
      Boundary conditions
      Defects
      Electronic structure
      Iterative methods
      Substrates
      Ultrasonics
      Stiffness
      Permalink
      http://hdl.handle.net/11693/24273
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.1764941
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
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