Cobalt-substituted SrTiO3 films (SrTi0.70Co0.30O3-δ) were grown on SrTiO3 substrates using pulsed laser deposition under oxygen pressures ranging from 1 μTorr to 20 mTorr. The effect of oxygen pressure on structural, magnetic, optical, and magneto-optical properties of the films was investigated. The film grown at 3 μTorr has the highest Faraday rotation (FR) and magnetic saturation moment (Ms). Increasing oxygen pressure during growth reduced Ms, FR and optical absorption in the nearinfrared. This trend is attributed to decreasing Co2+ ion concentration and oxygen vacancy concentration with higher oxygen partial pressure during growth. © 2015 Optical Society of America.