Polymeric waveguide Bragg grating filter using soft lithography
Optical Society of American (OSA)
10228 - 10232
Item Usage Stats
We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters. © 2006 Optical Society of America.
Electron beam lithography
Fiber Bragg gratings
Polymeric waveguide Bragg grating filter