Polymeric waveguide Bragg grating filter using soft lithography
Author
Kocabas, A.
Aydınlı, Atilla
Date
2006Source Title
Optics Express
Print ISSN
10944087
Publisher
Optical Society of American (OSA)
Volume
14
Issue
22
Pages
10228 - 10232
Language
English
Type
ArticleItem Usage Stats
123
views
views
100
downloads
downloads
Abstract
We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters. © 2006 Optical Society of America.
Keywords
CuringElastomers
Electron beam lithography
Fiber Bragg gratings
Optical waveguides
Elastomeric stamp
Grating structures
Imprint machine
Polymeric waveguide Bragg grating filter
Optical filters