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      Polymeric waveguide Bragg grating filter using soft lithography

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      Author
      Kocabas, A.
      Aydınlı, Atilla
      Date
      2006
      Source Title
      Optics Express
      Print ISSN
      10944087
      Publisher
      Optical Society of American (OSA)
      Volume
      14
      Issue
      22
      Pages
      10228 - 10232
      Language
      English
      Type
      Article
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      Abstract
      We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters. © 2006 Optical Society of America.
      Keywords
      Curing
      Elastomers
      Electron beam lithography
      Fiber Bragg gratings
      Optical waveguides
      Elastomeric stamp
      Grating structures
      Imprint machine
      Polymeric waveguide Bragg grating filter
      Optical filters
      Permalink
      http://hdl.handle.net/11693/23878
      Published Version (Please cite this version)
      http://dx.doi.org/10.1364/OE.14.010228
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      • Department of Physics 2332
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