Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers
Author
Senlik, M. N.
Olcum, S.
Köymen, Hayrettin
Atalar, Abdullah
Date
2010Source Title
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Print ISSN
0885-3010
Publisher
IEEE
Volume
57
Issue
4
Pages
969 - 976
Language
English
Type
ArticleItem Usage Stats
181
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Abstract
The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency for both the immersion and the airborne applications. The results are verified by finite element simulations. The work is extended to calculate the radiation impedance of an array of cMUT cells positioned in a hexagonal pattern. A higher radiation resistance improves the bandwidth as well as the efficiency of the cMUT. The radiation resistance is determined to be a strong function of the cell spacing. It is shown that a center-to-center cell spacing of 1.25 wavelengths maximizes the radiation resistance, if the membranes are not too thin. It is also found that excitation of nonsymmetric modes may reduce the radiation resistance in immersion applications.
Keywords
A-centerAirborne applications
Capacitive micromachined ultrasonic transducer
Cell spacings
Circular membranes
Finite element simulations
Hexagonal pattern
Nonsymmetric
Parallel resonance
Radiation impedance
Radiation resistance
Velocity profiles
Plates (structural components)
Resonance
Transducers
Ultrasonic equipment
Ultrasonic measurement
Ultrasonic transducers
Ultrasonic waves
Ultrasonics
Radiation
Permalink
http://hdl.handle.net/11693/22364Published Version (Please cite this version)
http://dx.doi.org/10.1109/TUFFC.20http://dx.doi.org/10.1501Collections
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