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      Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers

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      Author
      Senlik, M. N.
      Olcum, S.
      Köymen, Hayrettin
      Atalar, Abdullah
      Date
      2010
      Source Title
      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
      Print ISSN
      0885-3010
      Publisher
      IEEE
      Volume
      57
      Issue
      4
      Pages
      969 - 976
      Language
      English
      Type
      Article
      Item Usage Stats
      181
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      133
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      Abstract
      The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency for both the immersion and the airborne applications. The results are verified by finite element simulations. The work is extended to calculate the radiation impedance of an array of cMUT cells positioned in a hexagonal pattern. A higher radiation resistance improves the bandwidth as well as the efficiency of the cMUT. The radiation resistance is determined to be a strong function of the cell spacing. It is shown that a center-to-center cell spacing of 1.25 wavelengths maximizes the radiation resistance, if the membranes are not too thin. It is also found that excitation of nonsymmetric modes may reduce the radiation resistance in immersion applications.
      Keywords
      A-center
      Airborne applications
      Capacitive micromachined ultrasonic transducer
      Cell spacings
      Circular membranes
      Finite element simulations
      Hexagonal pattern
      Nonsymmetric
      Parallel resonance
      Radiation impedance
      Radiation resistance
      Velocity profiles
      Plates (structural components)
      Resonance
      Transducers
      Ultrasonic equipment
      Ultrasonic measurement
      Ultrasonic transducers
      Ultrasonic waves
      Ultrasonics
      Radiation
      Permalink
      http://hdl.handle.net/11693/22364
      Published Version (Please cite this version)
      http://dx.doi.org/10.1109/TUFFC.20http://dx.doi.org/10.1501
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      • Department of Electrical and Electronics Engineering 3650
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