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dc.contributor.authorShahmoon, A.en_US
dc.contributor.authorLimon, O.en_US
dc.contributor.authorGirshevitz, O.en_US
dc.contributor.authorFleger, Y.en_US
dc.contributor.authorDemir, Hilmi Volkanen_US
dc.contributor.authorZalevsky, Z.en_US
dc.date.accessioned2016-02-08T09:58:55Z
dc.date.available2016-02-08T09:58:55Z
dc.date.issued2009-12-16en_US
dc.identifier.issn0167-9317
dc.identifier.urihttp://hdl.handle.net/11693/22345
dc.description.abstractIn this paper, we present the fabrication procedures as well as the preliminary experimental results of a novel method for significantly simplified deposition of charged nanoparticles at specific patterns based on focused ion beam (FIB) technology. The deposition method relies on the implantation of positive gallium ions on an insulated material which creates the basis for attracting the nanoparticles to the substrate. In order to substantiate the theory two patterns were generated on a silicon on insulator (SOI) chip with an upper layer of silicon of 200 nm. The two patterns are as follows: resolution target - consisting of six squares and 400 nm × 400 nm circular sinusoidal tunnel. In addition, we demonstrate the utilization and applicability of the aforementioned method in a tunable radiation nano device as well as show its experimental characterization.en_US
dc.language.isoEnglishen_US
dc.source.titleMicroelectronic Engineeringen_US
dc.relation.isversionofhttp://dx.doi.org/10.1016/j.mee.2009.12.031en_US
dc.subjectNanofabricationen_US
dc.subjectNanoparticle patterningen_US
dc.subjectParticle attachmenten_US
dc.subjectParticle depositionen_US
dc.titleTunable nano devices fabricated by controlled deposition of gold nanoparticles via focused ion beamen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.citation.spage1363en_US
dc.citation.epage1366en_US
dc.citation.volumeNumber87en_US
dc.citation.issueNumber5-8en_US
dc.identifier.doi10.1016/j.mee.2009.12.031en_US
dc.publisherElsevieren_US
dc.contributor.bilkentauthorDemir, Hilmi Volkan


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