An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
1468 - 1477
MetadataShow full item record
Please cite this item using this persistent URLhttp://hdl.handle.net/11693/21877
The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model exists for understanding the mechanics and limits of the collapse mode. In this work, we develop an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT with given dimensions and mechanical parameters under any large or small signal electrical excitation, including the collapse mode. The static and dynamic deflections of a plate predicted from the model are compared with finite element simulations. The equivalent circuit model can estimate the static deflection and transient behavior of a CMUT plate to within 5% accuracy. The circuit model is in good agreement with experimental results of pulse excitation applied to fabricated CMUTs. The model is suitable as a powerful design and optimization tool for collapsed and uncollapsed CMUTs. © 2011 IEEE.
- Research Paper 7144
Showing items related by title, author, creator and subject.
Bilateral CMUT cells and arrays: Equivalent circuits, diffraction constants, and substrate impedance Koymen H.; Atalar A.; Tasdelen A.S. (Institute of Electrical and Electronics Engineers Inc., 2017)We introduce the large-signal and small-signal equivalent circuit models for a capacitive micromachined ultrasonic transducer (CMUT) cell, which has radiating plates on both sides. We present the diffraction coefficient ...
Yamaner F.Y.; Olcum, S.; Bozkurt, A.; Koymen H.; Atalar, A. (2010)Capacitive micromachined ultrasonic transducers (CMUTs) have demonstratedvarious advantages over piezoelectric transducers. However, current CMUT designsproduce low output pressures with high harmonic distortions. Optimizing ...
Köymen H.; Atalar, A.; Aydoǧdu, E.; Kocabaş, C.; Oǧuz H.K.; Olçum, S.; Ozgurluk, A.; Ünlügedik, A. (2012)This paper describes a correction and an extension in the previously published large signal equivalent circuit model for a circular capacitive micromachined ultrasonic transducer (CMUT) cell. The force model is rederived ...