Design of a high-resolution microfluidic microwave MEMS phase shifter
Microwave and Optical Technology Letters
1902 - 1905
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In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time.