Flexible strain sensors based on electrostatically actuated graphene flakes
Author
Fardindoost, S.
Alipour, A.
Mohammadi, S.
Gökyar, S.
Sarvari, R.
Iraji Zad, A.
Demir, Hilmi Volkan
Date
2015Source Title
Journal of Micromechanics and Microengineering
Print ISSN
0960-1317
Publisher
Institute of Physics Publishing
Volume
25
Issue
7
Pages
1 - 7
Language
English
Type
ArticleItem Usage Stats
136
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Abstract
In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 μm, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of ∼60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations. © 2015 IOP Publishing Ltd.
Keywords
Graphene electromechanical resonatorElectromechanical devices
Electrostatic actuators
Natural frequencies
Resonance
Electrical actuation
Electromechanical resonators
Flexible sensor
Mechanical resonance frequency
Non - planar surfaces
Physical dimensions
Resonance frequencies
Strain sensing
Graphene
Permalink
http://hdl.handle.net/11693/21569Published Version (Please cite this version)
http://dx.doi.org/10.1088/0960-1317/25/7/075016Collections
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