Flexible strain sensors based on electrostatically actuated graphene flakes
Journal of Micromechanics and Microengineering
Institute of Physics Publishing
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In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 μm, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of ∼60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations. © 2015 IOP Publishing Ltd.
KeywordsGraphene electromechanical resonator
Mechanical resonance frequency
Non - planar surfaces
Published Version (Please cite this version)http://dx.doi.org/10.1088/0960-1317/25/7/075016
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