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      Flexible strain sensors based on electrostatically actuated graphene flakes

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      Author
      Fardindoost, S.
      Alipour, A.
      Mohammadi, S.
      Gökyar, S.
      Sarvari, R.
      Iraji Zad, A.
      Demir, Hilmi Volkan
      Date
      2015
      Source Title
      Journal of Micromechanics and Microengineering
      Print ISSN
      0960-1317
      Publisher
      Institute of Physics Publishing
      Volume
      25
      Issue
      7
      Pages
      1 - 7
      Language
      English
      Type
      Article
      Item Usage Stats
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      Abstract
      In this paper we present flexible strain sensors made of graphene flakes fabricated, characterized, and analyzed for the electrical actuation and readout of their mechanical vibratory response in strain-sensing applications. For a typical suspended graphene membrane fabricated with an approximate length of 10 μm, a mechanical resonance frequency around 136 MHz with a quality factor (Q) of ∼60 in air under ambient conditions was observed. The applied strain can shift the resonance frequency substantially, which is found to be related to the alteration of physical dimension and the built-in strain in the graphene flake. Strain sensing was performed using both planar and nonplanar surfaces (bending with different radii of curvature) as well as by stretching with different elongations. © 2015 IOP Publishing Ltd.
      Keywords
      Graphene electromechanical resonator
      Electromechanical devices
      Electrostatic actuators
      Natural frequencies
      Resonance
      Electrical actuation
      Electromechanical resonators
      Flexible sensor
      Mechanical resonance frequency
      Non - planar surfaces
      Physical dimensions
      Resonance frequencies
      Strain sensing
      Graphene
      Permalink
      http://hdl.handle.net/11693/21569
      Published Version (Please cite this version)
      http://dx.doi.org/10.1088/0960-1317/25/7/075016
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Department of Physics 2299
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
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