Fabrication of hafnia hollow nanofibers by atomic layer deposition using electrospun nanofiber templates
Akgun, C. O.
Journal of Alloys and Compounds
146 - 151
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Hafnia (HfO2) hollow nanofibers (HNs) were synthesized by atomic layer deposition (ALD) using electrospun nylon 6,6 nanofibers as templates. HfO2 layers were deposited on polymeric nanofibers at 200 °C by alternating reactant exposures of tetrakis(dimethylamido)hafnium and water. Polymeric nanofiber templates were subsequently removed by an ex situ calcination process at 500 °C under air ambient. Morphological and structural characterizations of the HN samples were conducted by scanning electron microscopy, transmission electron microscopy and X-ray diffraction. Freestanding network of HfO2 HNs was found to be polycrystalline with a monoclinic crystal structure. Elemental composition and chemical bonding states of the resulting HfO2 HNs were studied by using X-ray photoelectron spectroscopy. The presence of HfO2 was evidenced by high resolution scans of Hf 4f and O 1s with binding energies of 16.3-17.9 and 529.6 eV, respectively. Combination of electrospinning and ALD processes provided an opportunity to precisely control both diameter and wall thickness of the synthesized HfO2 HNs. © 2013 Elsevier B.V. All rights reserved.