Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers
Current Applied Physics
1060 - 1063
Item Usage Stats
We investigate phosphorus in-situ doping characteristics in germanium (Ge) during epitaxial growth by spreading resistance profiling analysis. In addition, we present an accurate model for the kinetics of the diffusion in the in-situ process, modeling combined growth and diffusion events. The activation energy and pre-exponential factor for phosphorus (P) diffusion are determined to be 1.91 eV and 3.75 × 10-5 cm2/s. These results show that P in-situ doping diffusivity is low enough to form shallow junctions for high performance Ge devices.
Spreading resistance profiling
Published Version (Please cite this version)http://dx.doi.org/10.1016/j.cap.2013.02.021
Showing items related by title, author, creator and subject.
Yu, H.-Y.; Park, J.-H.; Okyay, Ali Kemal; Saraswat, K. C. (2008-10)We demonstrate a promising approach for the monolithic integration of Ge-based nanoelectronics and nanophotonics with S-ilicon: the selective deposition of Ge on Si by Multiple Hydrogen Annealing for Heteroepitaxy (MHAH). ...
Surface evolution of 4H-SiC(0001) during in-situ surface preparation and its influence on graphene properties Ul Hassan J.; Meyer, A.; Çakmakyapan, Semih; Kazar, Özgür; Flege J.I.; Falta J.; Özbay, Ekmel; Janzén, E. (Trans Tech Publications, Switzerland, 2013)The evolution of SiC surface morphology during graphene growth process has been studied through the comparison of substrate surface step structure after in-situ etching and graphene growth in vacuum. Influence of in-situ ...
Gold supported on ceria doped by Me3+ (Me = Al and Sm) for water gas shift reaction: Influence of dopant and preparation method Andreeva, D.; Kantcheva, M.; Ivanov, I.; Ilieva, L.; Sobczak, J. W.; Lisowski, W. (2010)Gold catalysts supported on ceria doped by Sm and Al were studied. The influence of the preparation method, as well as the nature of dopants on the structure, properties and WGS activity are investigated. The applied methods ...