Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers
Yu, H. -Y.
Okyay, A., K.
Park J. -H.
Baek, J. W.
Saraswat, K. C.
Current Applied Physics
1060 - 1063
Item Usage Stats
MetadataShow full item record
We investigate phosphorus in-situ doping characteristics in germanium (Ge) during epitaxial growth by spreading resistance profiling analysis. In addition, we present an accurate model for the kinetics of the diffusion in the in-situ process, modeling combined growth and diffusion events. The activation energy and pre-exponential factor for phosphorus (P) diffusion are determined to be 1.91 eV and 3.75 × 10-5 cm2/s. These results show that P in-situ doping diffusivity is low enough to form shallow junctions for high performance Ge devices.
Spreading resistance profiling
Published Version (Please cite this version)http://dx.doi.org/10.1016/j.cap.2013.02.021
Showing items related by title, author, creator and subject.
Perceived auditory environment in historic spaces of anatolian culture : a case study on Hacı Bayram mosque Acun V.; Yilmazer, Semiha; Taherzadeh, P. (International Institute of Acoustics and Vibrations, 2016)This article reports the initial finds of a research that is concerned with the perceived auditory environment within an historical mosque and its surroundings. Haci Bayram Mosque and its surrounding area of Hamamönü has ...
Çankaya, S.; Yilmazer, S. (German Acoustical Society (DEGA), 2016)In 2014, ISO 12913-1 standard was established for the conceptual soundscape framework to assess soundscape studies. According to this framework, soundscape process includes the examination of acoustic environment and its ...
Gold supported on ceria doped by Me3+ (Me = Al and Sm) for water gas shift reaction: Influence of dopant and preparation method Andreeva, D.; Kantcheva, M.; Ivanov, I.; Ilieva, L.; Sobczak, J. W.; Lisowski, W. (2010)Gold catalysts supported on ceria doped by Sm and Al were studied. The influence of the preparation method, as well as the nature of dopants on the structure, properties and WGS activity are investigated. The applied methods ...