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      Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses

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      Author
      Öktem, B.
      Pavlov, I.
      Ilday, S.
      Kalaycıoǧlu, H.
      Rybak, A.
      Yavaş, S.
      Erdoǧan, M.
      Ilday F. Ö.
      Date
      2013
      Source Title
      Nature photonics
      Print ISSN
      1749-4885
      Publisher
      Nature publishing group
      Volume
      7
      Issue
      11
      Pages
      897 - 901
      Language
      English
      Type
      Article
      Item Usage Stats
      137
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      339
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      Abstract
      Dynamical systems based on the interplay of nonlinear feedback mechanisms are ubiquitous in nature. Well-understood examples from photonics include mode locking and a broad class of fractal optics, including self-similarity. In addition to the fundamental interest in such systems, fascinating technical functionalities that are difficult or even impossible to achieve with linear systems can emerge naturally from them if the right control tools can be applied. Here, we demonstrate a method that exploits positive nonlocal feedback to initiate, and negative local feedback to regulate, the growth of ultrafast laser-induced metal-oxide nanostructures with unprecedented uniformity, at high speed, low cost and on non-planar or flexible surfaces. The nonlocal nature of the feedback allows us to stitch the nanostructures seamlessly, enabling coverage of indefinitely large areas with subnanometre uniformity in periodicity. We demonstrate our approach through the fabrication of titanium dioxide and tungsten oxide nanostructures, but it can also be extended to a large variety of other materials.
      Keywords
      Feedback mechanisms
      Flexible surfaces
      Nano-structuring
      Nonlinear lasers
      Nonlocal feedback
      Self-similarities
      Technical functionalities
      Tungsten oxide
      Dynamical systems
      Electromagnetic pulse
      Linear systems
      Nanostructures
      Oxides
      Ultrafast lasers
      Permalink
      http://hdl.handle.net/11693/20735
      Published Version (Please cite this version)
      http://dx.doi.org/10.1038/nphoton.2013.272
      Collections
      • Department of Physics 2329
      • Institute of Materials Science and Nanotechnology (UNAM) 1831
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