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dc.contributor.advisorOkyay, Ali Kemal
dc.contributor.authorÖzgöztaşı, Elif
dc.date.accessioned2016-01-08T18:28:24Z
dc.date.available2016-01-08T18:28:24Z
dc.date.issued2014
dc.identifier.urihttp://hdl.handle.net/11693/16003
dc.descriptionAnkara : The Department of Material Science and Nanotechnology Program of The Graduate School of Engineering and Science of Bilkent University, 2014.en_US
dc.descriptionThesis (Master's) -- Bilkent University, 2014.en_US
dc.descriptionIncludes bibliographical references leaves 48-53.en_US
dc.description.abstractPiezoelectric materials are used in different types of transducers such as microphones, accelerometers, speakers, hydrophones, pressure sensors etc. Compared to traditional bulk piezoelectric crystals, thin film piezoelectric materials are promising to realize integrated devices with CMOS technology. Among thin film materials, zinc oxide (ZnO) is attractive due to the giant piezoelectric effect when doped with vanadium. In this study, we investigate the deposition of thin film ZnO and V-doped ZnO films. Materials characterization of ZnO thin films is performed. We also investigate surface acoustic wave (SAW) devices based on ZnO thin films. SAW devices are formed by a pair of interdigitated transducers (IDTs), input and output IDTs. IDTs are fabricated onto the piezoelectric thin film. Applied oscillating electric field from input IDT creates surface acoustic waves in the piezoelectric thin film and these acoustic waves are converted back into an electrical signal at the output IDT. SAW devices based on ZnO and V-doped ZnO films were designed and fabricated. Frequency response of SAW devices is measured. In addition, finite element simulations of SAW devices are shown to be in agreement with measurement results. We discuss resonance frequency and insertion loss of SAW devices.en_US
dc.description.statementofresponsibilityÖzgöztaşı, Elifen_US
dc.format.extentxiii, 53 leaves, graphicsen_US
dc.language.isoEnglishen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectPiezoelectricen_US
dc.subjectthin filmsen_US
dc.subjectSAWen_US
dc.subjectZnOen_US
dc.subjecten_US
dc.subject.lccTK7872.P54 O94 2014en_US
dc.subject.lcshPiezoelectric devices.en_US
dc.subject.lcshPiezoelectric materials.en_US
dc.titleExperimental and computational investigation of zinc oxide based surface acoustic wave devicesen_US
dc.typeThesisen_US
dc.departmentGraduate Program in Materials Science and Nanotechnologyen_US
dc.publisherBilkent Universityen_US
dc.description.degreeM.S.en_US


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