Fabrication and characterization of zinc oxide based surface acoustic wave devices
Author
Noyan, Mehmet Alican
Advisor
Bıyıklı, Necmi
Date
2013Publisher
Bilkent University
Language
English
Type
ThesisItem Usage Stats
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Abstract
Surface acoustic wave (SAW) devices, as applied to today’s technology, were
first described in 1965. Since then, these devices were applied to a wide variety
of fields. Bandpass filter is their most common application, which is an
important component in consumer products such as televisions and mobile
phones. SAW devices can also be utilized as chemical and biological sensors.
Driving force behind the development of SAW sensors is their small size, high
sensitivity, reliability, and durability.
This thesis presents the development and characterization of ZnO/Si based
SAW devices. ZnO thin films with c-axis orientation were deposited using rfmagnetron
sputtering. Effect of post deposition annealing on the structure of
ZnO and on the SAW device performance was studied. It was found that
annealing ZnO above 600o
C is detrimental for SAW device performance.
Surface roughness of ZnO increases as the annealing temperature increases. In
literature, roughness increase is presented as one of the reasons behind device
breakdown. This work shows that roughness is not the primary cause for the
breakdown. In addition, effect of SiO2 interlayer insertion between ZnO/Si
structure on the device performance was examined together with the effect of
ZnO thickness.