Microfabrication of micro Hall sensors on GaAs and INSB for scanning hall probe microscopy

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Author
Kaval, Mehmet Murat
Advisor
Oral, Ahmet
Date
2001Publisher
Bilkent University
Language
English
Type
Thesis
Metadata
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http://hdl.handle.net/11693/14520Abstract
Different techniques have been developed to investigate the surface magnetic
structure of materials, including Hall probe, scanning superconductivity quantum
interference device (SQUID) and magnetic force microscopies (MFMs), Bitter
decoration, Faraday rotation, and electron holography. Recently, the scanning
Hall probe microscope (SHPM) has been shown to be a very sensitive, noninvasive
instrument with which to obtain quantitative measurements of surface
magnetic field profiles with high spatial resolution ( 120 nm)under variable temperature
and magnetic field operation. In this thesis we are going to present
microfabrication of Hall probes of < 1 micron on GaAs/AlGaAs 2DEG and InSb
material to be used for Scanning Hall Probe Microscopy (SHPM) for magnetic
imaging at sub-micron scale. First images obtained by InSb Hall probes will be
presented