Microfabrication of micro Hall sensors on GaAs and INSB for scanning hall probe microscopy

Abstract

Different techniques have been developed to investigate the surface magnetic structure of materials, including Hall probe, scanning superconductivity quantum interference device (SQUID) and magnetic force microscopies (MFMs), Bitter decoration, Faraday rotation, and electron holography. Recently, the scanning Hall probe microscope (SHPM) has been shown to be a very sensitive, noninvasive instrument with which to obtain quantitative measurements of surface magnetic field profiles with high spatial resolution ( 120 nm)under variable temperature and magnetic field operation. In this thesis we are going to present microfabrication of Hall probes of < 1 micron on GaAs/AlGaAs 2DEG and InSb material to be used for Scanning Hall Probe Microscopy (SHPM) for magnetic imaging at sub-micron scale. First images obtained by InSb Hall probes will be presented