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      • Faculty of Engineering
      • Department of Electrical and Electronics Engineering
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      Dual integrated actuators for extended range high speed atomic force microscopy

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      Author
      Sulchek, T.
      Minne, S. C.
      Adams, J. D.
      Fletcher, D. A.
      Atalar, Abdullah
      Quate, C. F.
      Adderton, D. M.
      Date
      1999-09-13
      Source Title
      Applied Physics Letters
      Print ISSN
      0003-6951
      Electronic ISSN
      1077-3118
      Publisher
      A I P Publishing LLC
      Volume
      75
      Issue
      11
      Pages
      1637 - 1639
      Language
      English
      Type
      Article
      Item Usage Stats
      108
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      96
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      Abstract
      A flexible system for increasing the throughput of the atomic force microscope without sacrificing imaging range is presented. The system is based on a nested feedback loop which controls a micromachined cantilever that contains both an integrated piezoelectric actuator and an integrated thermal actuator. This combination enables high speed imaging (2 mm/s) over an extended range by utilizing the piezoelectric actuator’s high bandwidth (15 kHz) and thermal actuator’s large response (300 nm/V). A constant force image, where the sample topography exceeds the range of the piezoelectric actuator alone, is presented. It has also been demonstrated that the deflection response of the thermal actuator can be linearized and controlled with an integrated diode.
      Keywords
      Sensors
      Permalink
      http://hdl.handle.net/11693/13502
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.124779
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      • Department of Electrical and Electronics Engineering 3608
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