Dual integrated actuators for extended range high speed atomic force microscopy
Author
Sulchek, T.
Minne, S. C.
Adams, J. D.
Fletcher, D. A.
Atalar, Abdullah
Quate, C. F.
Adderton, D. M.
Date
1999-09-13Source Title
Applied Physics Letters
Print ISSN
0003-6951
Electronic ISSN
1077-3118
Publisher
A I P Publishing LLC
Volume
75
Issue
11
Pages
1637 - 1639
Language
English
Type
ArticleItem Usage Stats
108
views
views
96
downloads
downloads
Abstract
A flexible system for increasing the throughput of the atomic force microscope without sacrificing imaging range is presented. The system is based on a nested feedback loop which controls a micromachined cantilever that contains both an integrated piezoelectric actuator and an integrated thermal actuator. This combination enables high speed imaging (2 mm/s) over an extended range by utilizing the piezoelectric actuator’s high bandwidth (15 kHz) and thermal actuator’s large response (300 nm/V). A constant force image, where the sample topography exceeds the range of the piezoelectric actuator alone, is presented. It has also been demonstrated that the deflection response of the thermal actuator can be linearized and controlled with an integrated diode.