Room temperature large-area nanoimprinting for broadband biomimetic antireflection surfaces

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2011

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Abstract

Ordered arrays of subwavelength hydrogen silsesquioxane (HSQ) nanorods on glass substrates are fabricated using room temperature nanoimprint lithography and anodized aluminum oxide membranes. Moth-eye type nanorod arrays exhibited superior omnidirectional antireflection characteristics in visible wavelengths. The ellipsometric measurements revealed that average specular reflection is remaining below 1% up to 55 degrees incidence angles. Transmission measurements at normal incidence resulted in significant increase in transmitted light intensity with respect to plain glass. Simulations showed that up to 99% transmission could be obtained from double sided tapered HSQ nanorod arrays on HSQ thin film and glass substrates. Achieving large-area, broadband and omnidirectional antireflective surfaces on glass pave the way for applications including photovoltaics. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3657766]

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Applied Physics Letters

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American Institute of Physics

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Published Version (Please cite this version)

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English