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      Low-Temperature Deposition of Hexagonal Boron Nitride via Sequential Injection of Triethylboron and N2/H2 Plasma

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      Author
      Haider A.
      Ozgit Akgun, C.
      Goldenberg, E.
      Okyay, Ali Kemal
      Bıyıklı, Necmi
      Date
      2014
      Source Title
      Journal of the American Ceramic Society
      Print ISSN
      0002-7820
      Publisher
      Wiley-Blackwell Publishing, Inc.
      Volume
      97
      Issue
      12
      Pages
      4052 - 4059
      Language
      English
      Type
      Article
      Item Usage Stats
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      155
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      Abstract
      Hexagonal boron nitride (hBN) thin films were deposited on silicon and quartz substrates using sequential exposures of triethylboron and N 2 /H 2 plasma in a hollow-cathode plasma- assisted atomic layer deposition reactor at low temperatures ( ≤ 450 ° C). A non-saturating film deposition rate was observed for substrate temperatures above 250 ° C. BN films were charac- terized for their chemical composition, crystallinity, surface morphology, and optical properties. X-ray photoelectron spec- troscopy (XPS) depicted the peaks of boron, nitrogen, carbon, and oxygen at the film surface. B 1s and N 1s high-resolution XPS spectra confirmed the presence of BN with peaks located at 190.8 and 398.3 eV, respectively. As deposited films were polycrystalline, single-phase hBN irrespective of the deposition temperature. Absorption spectra exhibited an optical band edge at ~ 5.25 eV and an optical transmittance greater than 90% in the visible region of the spectrum. Refractive index of the hBN film deposited at 450 ° C was 1.60 at 550 nm, which increased to 1.64 after postdeposition annealing at 800 ° C for 30 min. These results represent the first demonstration of hBN deposi- tion using low-temperature hollow-cathode plasma-assisted sequential deposition technique. © 2014 The American Ceramic Society.
      Keywords
      Atomic Layer Deposition
      Chemical-vapor-deposition
      Thin-films
      Mechanical-properties
      Optical-properties
      Pressure
      Graphite
      Diamond
      Bn
      Composites
      Permalink
      http://hdl.handle.net/11693/12754
      Published Version (Please cite this version)
      http://dx.doi.org/10.1111/jace.13213
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