• About
  • Policies
  • What is openaccess
  • Library
  • Contact
Advanced search
      View Item 
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Science
      • Department of Physics
      • View Item
      •   BUIR Home
      • Scholarly Publications
      • Faculty of Science
      • Department of Physics
      • View Item
      JavaScript is disabled for your browser. Some features of this site may not work without it.

      Design and realization of a fully on-chip High-Q resonator at 15 GHz on silicon

      Thumbnail
      View / Download
      907.5 Kb
      Author
      Melik, R.
      Perkgoz, N. K.
      Unal, E.
      Dilli, Z.
      Demir, Hilmi Volkan
      Date
      2008-12
      Source Title
      IEEE Transactions on Electron Devices
      Print ISSN
      0018-9383
      Electronic ISSN
      1557-9646
      Publisher
      Institute of Electrical and Electronics Engineers
      Volume
      55
      Issue
      12
      Pages
      3459 - 3466
      Language
      English
      Type
      Article
      Item Usage Stats
      144
      views
      102
      downloads
      Abstract
      We develop and demonstrate an on-chip resonator working at 15 GHz with a high quality factor (Q-factor) of 93.81 while only requiring a small chip size of 195 mu m x 195 mu m on Si by using our new design methodology. In our design, unlike previous approaches, we avoid the need for any external capacitance for tuning; instead, we utilize the film capacitance as the capacitor of the LC tank circuit and realize a fully on-chip resonator that shows a strong transmission dip of > 30 dB on resonance as required for telemetric-sensing applications. We present the design, theory, methodology, microfabrication, experimental characterization, and theoretical analysis of these resonators. We also demonstrate that the experimental results are in excellent agreement with the theoretical (both analytical and numerical) results. Based on our proof-of-concept demonstration, such high-Q on-chip resonators hold great promise for use in transmissive telemetric sensors.
      Keywords
      Fabrication
      Quality Factor (q-factor)
      Resonators
      Rfic
      Silicon
      Spiral Inductors
      Permalink
      http://hdl.handle.net/11693/11625
      Published Version (Please cite this version)
      http://doi.org/10.1109/TED.2008.2006533
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Department of Physics 2299
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
      Show full item record

      Browse

      All of BUIRCommunities & CollectionsTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartmentsThis CollectionTitlesAuthorsAdvisorsBy Issue DateKeywordsTypeDepartments

      My Account

      Login

      Statistics

      View Usage StatisticsView Google Analytics Statistics

      Bilkent University

      If you have trouble accessing this page and need to request an alternate format, contact the site administrator. Phone: (312) 290 1771
      Copyright © Bilkent University - Library IT

      Contact Us | Send Feedback | Off-Campus Access | Admin | Privacy