Resonance energy dissipation mechanism has been gaining importance in the interest of sensing applications. As such, the capacity for precise and fast measurement of the transient phase of motion has been desirable. The development of optomechanics in recent years has enabled such a fast scheme. Here a design, setup, and measurement of a silicon nitride optomechanical system is explored. Fundamental parameters of the design are investigated with simulation analysis. Grating structures, waveguides, and resonator parameters are explored. A series of optical resonance responses are observed, and the resonance characteristics are analyzed for optomechanical devices of combinations of design parameters. Measurements on devices of different nanomechanical beam modulation schemes are performed. To translate the technique from the optical to microwave domain, an integration of a split ring resonator (SRR) cavity and NEMS device is explored. Mode simulation of the modified cavity design is done. A technique of alignment of EBL to an existing pattern on an insulating surface is optimized. The studied designs leave possibilities for applications in real-time mass sensing and fundamental studies on energy dissipation mechanisms.