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      • Department of Electrical and Electronics Engineering
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      An analtical model for vibration analysis of disk resonator gyroscopes

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      Author(s)
      Hosseini-Pishrobat, Mehran
      Uzunoğlu, Baha Erim
      Erkan, Derin
      Tatar, Erdinç
      Date
      2022-06-08
      Source Title
      International Symposium on Inertial Sensors and Systems (ISISS)
      Publisher
      Institute of Electrical and Electronics Engineers
      Pages
      1 - 4
      Language
      English
      Type
      Conference Paper
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      Abstract
      Disk resonator gyroscopes (DRGs) utilize the circular symmetry of a set of concentric rings to realize high-performance MEMS gyroscopes. We set forth an analytical method to calculate the mode shapes of the rings and then obtain the corresponding modal mass, Coriolis mass, and stiffness. Following the Ritz method, we minimize the total potential energy of the rings subject to the boundary conditions imposed by the spokes that connect the rings. We show the efficacy of our method using the frequency response of a fabricated DRG and comparison with the finite element method (FEM). With respect to the FEM, our modeling is more straightforward, more intuitive, and can be extended to model imperfections and ensuing effects such as quadrature error and frequency split.
      Keywords
      Disk resonator gyroscope
      MEMS
      Mode shape
      The ritz method
      Permalink
      http://hdl.handle.net/11693/111886
      Published Version (Please cite this version)
      https://doi.org/10.1109/INERTIAL53425.2022.9787727
      Collections
      • Department of Electrical and Electronics Engineering 4011
      • Institute of Materials Science and Nanotechnology (UNAM) 2258
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