Machine learning-based high-precision and real-time focus detection for laser material processing systems
Date
2022-05-17Source Title
SPIE - International Society for Optical Engineering. Proceedings
Print ISSN
0277-786X
Publisher
S P I E - International Society for Optical Engineering
Volume
12138
Pages
1 - 7
Language
English
Type
Conference PaperItem Usage Stats
13
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4
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Abstract
This work explores a real-time and high precision focus finding for the ultrafast laser material
processing for a
different types of materials. Focus detection is essential for laser machining because an unfocused
beam cannot affect the material and, at worst, a destructive effect. Here, we compare CNN and
non-CNN-based approaches to focus detection, ultimately proposing a robust CNN model that can
achieve high performance when only trained on a portion of the dataset. We use an ordinary lens
(11 mm focal length, 0.25 NA) and a CMOS camera. Our robust CNN model achieved a focus
prediction accuracy of 95% when identifying focus distances in -150,
-140,...,0,...,150 µm, each step is about 7% of the Rayleigh length, and a high processing speed
of 1000+ Hz on a CPU.