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      • Department of Industrial Engineering
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      Surface integrity of monocrystalline silicon nanostructured with engineered multi-tip diamond tools

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      Author(s)
      Karpat, Yiğit
      Date
      2022-05
      Source Title
      International Journal of Advanced Manufacturing Technology
      Print ISSN
      0268-3768
      Publisher
      Springer
      Volume
      120
      Issue
      5-6
      Pages
      3983 - 3993
      Language
      English
      Type
      Article
      Item Usage Stats
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      Abstract
      The ability to fabricate micro/nanostructures on large surface areas would enhance product performance in optics and solar energy systems, where maintaining high productivity is also critical. Recently, diamond tools structured with nanoscale features have been used to machine ductile materials such as copper and electroless nickel. This study uses engineered diamond tools featuring multi-tip cutting edges to investigate nanoscale grooving of silicon. Multi-tip cutting edges create a certain level of pressure and temperature at the cutting zone, which leads to phase transformations in silicon. Experiments were performed using an ultra-precision machining setup to identify conditions leading to nanoscale ductile-mode machining of silicon. As nanogrooves reach 300 nm depth, hexagonal-Si (Si-IV) phase formation was observed based on laser Raman spectroscopy measurements. Hexagonal allotropes of silicon are known to improve light absorption of silicon. Additional experiments with non-structured diamond tools did not yield any Si-IV phase transformation, indicating the importance of obtaining necessary pressure and temperature conditions at the cutting zone.
      Keywords
      Diamond tool
      Micro/nano cutting
      Phase transformation
      Silicon
      Permalink
      http://hdl.handle.net/11693/111466
      Published Version (Please cite this version)
      https://doi.org/10.1007/s00170-022-09023-4
      Collections
      • Department of Industrial Engineering 758
      • Department of Mechanical Engineering 373
      • Institute of Materials Science and Nanotechnology (UNAM) 2258
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