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      Assessment of silicon, glass, FR4, PDMS and PMMA as a chip material for acoustic particle/cell manipulation in microfluidics

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      Author(s)
      Açıkgöz, Hande N.
      Karaman, A.
      Şahin, M. Akif
      Çaylan, Ö. R.
      Büke, G. C.
      Yıldırım, E.
      Eroğlu, İ. C.
      Erson-Bensan, A. E.
      Çetin, Barbaros
      Özer, M. B.
      Date
      2023-03
      Source Title
      Ultrasonics
      Volume
      129
      Pages
      1 - 13
      Language
      English
      Type
      Article
      Item Usage Stats
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      Abstract
      In the present study, the capabilities of different chip materials for acoustic particle manipulation have been assessed with the same microfluidic device architecture, under the same actuator and flow conditions. Silicon, glass, epoxy with fiberglass filling (FR4), polydimethylsiloxane (PDMS) and polymethyl methacrylate (PMMA) are considered as chip materials. The acoustophoretic chips in this study were manufactured with four different fabrication methods: plasma etching, chemical etching, micromachining and molding. A novel chip material, FR4, has been employed as a microfluidic chip material in acoustophoretic particle manipulation for the first time in literature, which combines the ease of manufacturing of polymer materials with improved acoustic performance. The acoustic particle manipulation performance is evaluated through acoustophoretic focusing experiments with 2μm and 12μm polystyrene microspheres and cultured breast cancer cell line (MDA-MB-231). Unlike the common approach in the literature, the piezoelectric materials were actuated with partitioned cross-polarized electrodes which allowed effective actuation of different family of chip materials. Different from previous studies, this study evaluates the performance of each acoustophoretic device through the perspective of synchronization of electrical, vibrational and acoustical resonances, considers the thermal performance of the chip materials with their effects on cell viability as well as manufacturability and scalability of their fabrication methods. We believe our study is an essential work towards the commercialization of acoustophoretic devices since it brings a critical understanding of the effect of chip material on device performance as well as the cost of achieving that performance.
      Keywords
      Acoustofluidics
      Piezoelectric actuators
      Vibrations
      Ultrasonics
      FR4
      Cultured cancer cells
      Permalink
      http://hdl.handle.net/11693/111349
      Published Version (Please cite this version)
      https://www.doi.org/10.1016/j.ultras.2022.106911
      Collections
      • Department of Mechanical Engineering 373
      • Institute of Materials Science and Nanotechnology (UNAM) 2258
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