Step edge junction (SEJ) rf-SQUID magnetometers and gradiometers were fabricated using PLD Y-Ea-Cu-0 films on LaA10,(100) and SrTi0,(100) substrates. Effects of different step structure and the film properties on the yield, optimal operating temperature, and the l/f noise of the SQUIDs were investigated. The step structure was controlled using various IBE processes. The devices on LaAIO, showed higher sensitivity to the step structure compared to those on SrTiO,. This was due to re-deposition of substrate material at the steps prepared using the conventional IBE process resulting in a very low yield of unstable SQUIDs. High yield of low l/f noise stable SQUIDs was obtained on LaAIO, substrates with sharp steps prepared using an optimized IBE process. A typical l/f noise corner frequency of about lOHz at 77K with two major temperature dependencies was obtained. The temperature dependencies of the l/f noise could be correlated to the junction and the film of washer area of the SQUIDS. The white noise of our devices showed a dependency mainly on the amplitude of the flux to voltage transfer function signal. The operating temperature range of the SQUIDs could be controlled by the step structure and narrowed when the optimal operating temperature range was increased. All the measured junctions of our devices on the modified steps showed RSJ type behavior with a moderate decrease of the R, versus temperature.