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dc.contributor.authorDegertekin, F. L.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorKhuri-Yakub, B. T.en_US
dc.date.accessioned2015-07-28T11:56:20Z
dc.date.available2015-07-28T11:56:20Z
dc.date.issued1998-08-10en_US
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/11693/10928
dc.description.abstractUltrasonic air transducers using leaky waves on thin membranes are analyzed using perturbation and normal mode approaches. The transducers utilize the efficient coupling of ultrasonic energy to air through radiation of these leaky wave modes when their phase velocity is close to the sound speed in air. Theoretical results on optimum transducer dimensions and bandwidth estimation show that a minimum conversion loss of 8.7 dB with a 78% fractional bandwidth is possible. Common micromachining materials are shown to be suitable transducer materials and result in feasible devices. This is demonstrated by fabricating a 580 kHz transducer using a silicon membrane bonded to a ring of PZT-5H. With this configuration the transducer is self line focusing. Results of through transmission experiments on silicon and transmission images on paper are reported.en_US
dc.language.isoEnglishen_US
dc.source.titleApplied Physics Lettersen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.121986en_US
dc.subjectUltrasonic air transducersen_US
dc.subjectLeaky waveen_US
dc.titleMicromachinable ultrasonic leaky wave air transducersen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnologyen_US
dc.citation.spage741en_US
dc.citation.epage743en_US
dc.citation.volumeNumber73en_US
dc.citation.issueNumber6en_US
dc.identifier.doi10.1063/1.121986en_US
dc.publisherA I P Publishing LLCen_US


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