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      Silicon micromachined ultrasonic immersion transducers

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      Author
      Soh, H. T.
      Ladabaum, I.
      Atalar, Abdullah
      Quate, C. F.
      Khuri-Yakub, B. T.
      Date
      1996-12-09
      Source Title
      Applied Physics Letters
      Print ISSN
      0003-6951
      Electronic ISSN
      1077-3118
      Publisher
      A I P Publishing LLC
      Volume
      69
      Issue
      24
      Pages
      3674 - 3676
      Language
      English
      Type
      Article
      Item Usage Stats
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      Abstract
      Broadband transmission of ultrasound in water using capacitive, micromachined transducers is reported. Transmission experiments using the same pair of devices at 4, 6, and 8 MHz with a signal‐to‐noise ratio greater than 48 dB are presented. Transmission is observed from 1 to 20 MHz. Better receiving electronics are necessary to demonstrate operation beyond this range. Furthermore, the same pair of transducers is operated at resonance to demonstrate ultrasound transmission in air at 6 MHz. The versatile transducers are made using siliconsurfacemicromachining techniques. Computer simulations confirm the experimental results and are used to show that this technology promises to yield immersion transducers that are competitive with piezoelectric devices in terms of performance, enabling systems with 130 dB dynamic range. The advantage of the micromachined transducers is that they can be operated in high‐temperature environments and that arrays can be fabricated at lower cost.
      Keywords
      Signal processing
      Broadband transmission
      Ultrasonics
      Chemical elements
      Ultrasound
      Computer simulation
      Piezoelectric devices
      Surface micromachining
      Permalink
      http://hdl.handle.net/11693/10831
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.117185
      Collections
      • Department of Electrical and Electronics Engineering 3524
      • Institute of Materials Science and Nanotechnology (UNAM) 1775
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