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dc.contributor.authorManalis, S. R.en_US
dc.contributor.authorMinne, S. C.en_US
dc.contributor.authorAtalar, Abdullahen_US
dc.contributor.authorQuate, C. F.en_US
dc.date.accessioned2015-07-28T11:56:01Z
dc.date.available2015-07-28T11:56:01Z
dc.date.issued1996-09en_US
dc.identifier.issn0034-6748
dc.identifier.urihttp://hdl.handle.net/11693/10828
dc.description.abstractA new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is primarily limited by a mechanical resonance of 77 kHz when the cantilever is placed in contact with a surface. Images scanned with a tip velocity of 1 cm/s have been obtained in the constant force mode by using the optical lever to measure the cantilever stress. This is accomplished by subtracting an unwanted deflection produced by the actuator from the net deflection measured by the photodiode using a linear correction circuit. We have verified that the tip/sample force is constant by monitoring the cantilever stress with an implanted piezoresistor.en_US
dc.language.isoEnglishen_US
dc.source.titleReview of Scientific Instrumentsen_US
dc.relation.isversionofhttp://dx.doi.org/10.1063/1.1147410en_US
dc.subjectZinc oxide filmsen_US
dc.subjectVelocity measurementen_US
dc.subjectPiezoresistanceen_US
dc.subjectOptical sensorsen_US
dc.subjectAtomic force microscopyen_US
dc.subjectVibration resonanceen_US
dc.subjectImage sensorsen_US
dc.subjectPiezoelectric devicesen_US
dc.subjectAtomic force microscopesen_US
dc.subjectPhotodiodesen_US
dc.titleHigh‐speed atomic force microscopy using an integrated actuator and optical lever detectionen_US
dc.typeArticleen_US
dc.departmentDepartment of Electrical and Electronics Engineeringen_US
dc.departmentInstitute of Materials Science and Nanotechnology (UNAM)en_US
dc.citation.spage3294en_US
dc.citation.epage3297en_US
dc.citation.volumeNumber67en_US
dc.citation.issueNumber9en_US
dc.identifier.doi10.1063/1.1147410en_US
dc.publisherA I P Publishing LLCen_US
dc.identifier.eissn1089-7623


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