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      • Department of Electrical and Electronics Engineering
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      Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor

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      Author(s)
      Minne, S. C.
      Manalis, S. R.
      Atalar, Abdullah
      Quate, C. F.
      Date
      1996-01
      Source Title
      Applied Physics Letters
      Print ISSN
      0003-6951
      Electronic ISSN
      1077-3118
      Publisher
      A I P Publishing LLC
      Volume
      68
      Issue
      10
      Pages
      1427 - 1429
      Language
      English
      Type
      Article
      Item Usage Stats
      145
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      156
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      Abstract
      Using an atomic force microscope (AFM) with a silicon cantilever partially covered with a layer of zinc oxide (ZnO), we have imaged in the constant force mode by employing the ZnO as both a sensor and actuator. The cantilever deflection is determined by driving the ZnO at the second mechanical resonance while the tip is in contact with the sample. As the tip‐sample force varies, the mechanical boundary condition of the oscillating cantilever is altered, and the ZnO electrical admittance is changed. Constant force is obtained by offsetting the ZnO drive so that the admittance remains constant. We have also used the ZnO as an actuator and sensor for imaging in the intermittent contact mode. In both modes, images produced by using the ZnO as a sensor are compared to images acquired with a piezoresistive sensor.
      Keywords
      Chemical elements
      Electric measurements
      Piezoresistance
      Structural vibrations
      Metal oxides
      Permalink
      http://hdl.handle.net/11693/10827
      Published Version (Please cite this version)
      http://dx.doi.org/10.1063/1.116102
      Collections
      • Department of Electrical and Electronics Engineering 3702
      • Institute of Materials Science and Nanotechnology (UNAM) 1930
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