Browsing by Subject "Photolithography"
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Item Open Access Chemical and topographical modification of PHBV surface to promote osteoblast alignment and confinement(John Wiley & Sons, Inc., 2008) Kenar, H.; Kocabas, A.; Aydınlı, Atilla; Hasirci, V.Proper cell attachment and distribution, and thus stronger association in vivo between a bone implant and native tissue will improve the success of the implant. In this study, the aim was to achieve promotion of attachment and uniform distribution of rat mesenchymal stem cell-derived osteoblasts by introducing chemical and topographical cues on poly(3-hydroxybutyrate-co-3- hydroxyvalerate) (PHBV) film surfaces. As the chemical cues, either alkaline phosphatase was covalently immobilized on the film surface to induce deposition of calcium phosphate minerals or fibrinogen was adsorbed to improve cell adhesion. Microgrooves and micropits were introduced on the film surface by negative replication of micropatterned Si wafers. Both chemical cues improved cell attachment and even distribution on the PHBV films, but Fb was more effective especially when combined with the micropatterns. Cell alignment (<10° deviation angle) parallel to chemically modified microgrooves (1, 3, or 8 μm groove width) and on 10 μm-thick Fb lines printed on the unpatterned films was achieved. The cells on unpatterned and 5 μm-deep micropitted films were distributed and oriented randomly. Results of this study proved that microtopographies on PHBV can improve osseointegration when combined with chemical cues, and that microgrooves and cell adhesive protein lines on PHBV can guide selective osteoblast adhesion and alignment.Item Open Access Fabrication and characterization of SmCo5/Nb ferromagnetic/superconducting hybrid thin films grown by RF magnetron sputtering technique(Elsevier, 2017) Ongun, E.; Kuru, M.; Serhatlıoğlu, M.; Hançer, M.; Ozmetin, A. E.Ferromagnet/Superconductor (F/S) bilayer hybrids show exclusive states due to the mutual interaction between the superconductor and the underlying ferromagnetic substructures in micron scale. In this work, we aimed to observe the effects of the interaction between superconductivity and magnetism, especially the phenomenon involving the orientation and the size of magnetic stripes has been investigated in a coupled ferromagnetic/superconducting thin-film structure. In the proposed F/S hybrid system by this work, superconducting niobium thin-films were combined with underlying segments of ferromagnetic SmCo5 substructures. 300 nm thick magnetic films fabricated by RF magnetron sputtering techniques were topographically grown in patterns with stripes oriented either transverse to or along the direction of current flow. The elemental and microstructural analyses were conducted by EDX, SEM and GIXRD characterization tools. Low-temperature DC transport measurements were conducted by means of four point probe method in a 9T closed-cycle cryogenic refrigeration system. Transport superconducting properties, transition temperature TC(H) and second critical field HC2(T) were measured in a range of applied magnetic field between H = 0–9 kOe for the hybrid system. The results revealed that the artificial periodic modulation of applied field through preferentially-oriented magnetic stripes could introduce normal and superconducting channels or barriers for the current flow.Item Open Access Highly doped silicon micromachined photonic crystals(IEEE, Piscataway, NJ, United States, 2000) Temelkuran, B.; Bayındır, Mehmet; Özbay, Ekmel; Kavanaugh, J. P.; Sigalas, M. M.; Tuttle, G.Summary form only given. Photonic crystals are periodic structures with the property of reflecting the electromagnetic (EM) waves in all directions within a certain frequency range. These structures can be used to control and manipulate the behaviour of EM waves. Although earlier work concentrated on building these crystals with dielectric materials, there are certain advantages of introducing metals to photonic crystals. First, metals offer a high rejection rate when compared to the dielectric crystals. Second, for microwave applications, the dimensions of metallic crystals can be kept much smaller than the minimum dimensions needed for a typical dielectric crystal. In the paper, we propose a method for the fabrication of layer-by-layer metallic photonic crystals. A similar method had been used by Ozbay et al. to fabricate dielectric photonic crystals using silicon wafers. We fabricated a new layer-by-layer photonic crystal using highly doped silicon wafers.Item Open Access Imaging capability of pseudomorphic high electron mobility transistors, AlGaN/GaN, and Si micro-Hall probes for scanning Hall probe microscopy between 25 and 125 °c(American Vacuum Society, 2009) Akram, R.; Dede, M.; Oral, A.The authors present a comparative study on imaging capabilities of three different micro-Hall probe sensors fabricated from narrow and wide band gap semiconductors for scanning hall probe microscopy at variable temperatures. A novel method of quartz tuning fork atomic force microscopy feedback has been used which provides extremely simple operation in atmospheric pressures, high-vacuum, and variable-temperature environments and enables very high magnetic and reasonable topographic resolution to be achieved simultaneously. Micro-Hall probes were produced using optical lithography and reactive ion etching process. The active area of all different types of Hall probes were 1×1 μ m2. Electrical and magnetic characteristics show Hall coefficient, carrier concentration, and series resistance of the hall sensors to be 10 mG, 6.3× 1012 cm-2, and 12 k at 25 °C and 7 mG, 8.9× 1012 cm-2 and 24 k at 125 °C for AlGaNGaN two-dimensional electron gas (2DEG), 0.281 mG, 2.2× 1014 cm-2, and 139 k at 25 °C and 0.418 mG, 1.5× 1014 cm-2 and 155 k at 100 °C for Si and 5-10 mG, 6.25× 1012 cm-2, and 12 k at 25 °C for pseudomorphic high electron mobility transistors (PHEMT) 2DEG Hall probe. Scan of magnetic field and topography of hard disc sample at variable temperatures using all three kinds of probes are presented. The best low noise image was achieved at temperatures of 25, 100, and 125 °C for PHEMT, Si, and AlGaNGaN Hall probes, respectively. This upper limit on the working temperature can be associated with their band gaps and noise associated with thermal activation of carriers at high temperatures.Item Open Access Oil droplet manipulation on superomniphobic textured surfaces(Bilkent University, 2020-07) Yelekli, EcemMicrofluidic systems are mostly composed of closed microchannels in which flow is generated by syringe or pressure pumps. The flow in these channels can be droplet-based however access to each droplet individually in these systems is not possible. As an alternative approach to these channel-based devices, droplets can also be manipulated on surfaces by generating surface energy gradients. Since in these systems droplets can be handled individually and samples can be carried in small packages, these systems can perform more controlled operations. For instance, the concentration and volume of the samples can be adjusted more precisely. These systems can be very useful for biological analysis as well as chemical synthesis. Until now, transport of water droplets by using surface energy gradients has been demonstrated in literature. On the other hand, controlled transport of oil droplets on surfaces remained as a challenging task because of their low surface tension. In addition, in the literature, most of the work about oil droplet transportation was carried out in an aqueous environment, and therefore it restricts its potential for applications. This work demonstrates the transportation of microliter sized oil droplets by utilizing textured superomniphobic surfaces in a controlled way for the first time. By applying vertical vibration to the surface, oil droplets overcome hysteresis and move by following the textured tracks. Superoleophobicity is required to decrease the affinity of oil on the surface so that the motion of droplets can be achieved. This system has advantages such as the ability to control droplet motion individually by using a single input (vertical vibration) as well as mixing droplets in precise ratios, preventing clogging in channels and cross contamination as well as eliminating the usage of syringe pumps. In this project, initial focus was on examining the topography effect on superoleophobicity and fabricating superomniphobic surfaces. Surfaces were fabricated on silicon wafers by using conventional lithography technique. In this stage, two different microstructure profile was used on the surfaces: mushroom microstructure and straight sided microstructure. It was observed that mushroom microstructures were required to maintain superoleophobicity. Also, the effect of side length of microstructures, the distance between the microstructures and TiO2 coating on wettability were investigated. In order to achieve oil droplet transportation, superomniphobic textured surfaces were developed and these surfaces were tested by applying vertical vibration. As a final aim of this project, these surfaces were used for the nanoparticle synthesis.Item Open Access Polarization characteristics of compact SOI rib waveguide racetrack resonators(IEEE, 2005) Kiyat, I.; Aydınlı, Atilla; Dagli, N.We report on the development of compact optical racetrack resonators on silicon-on-insulator (SOI) rib waveguides. We make use of large-cross-section waveguides instead of photonic wire waveguides. We fabricated resonators with bending radii down to 20 μm and characterized for both transverse-electric and transverse-magnetic polarizations. Different polarization characteristics were analyzed and related to the modal shape of the SOI waveguide. These compact resonators show large free spectral ranges (3.0 nm), high finesse (19), and Q-factor (28 000) values.Item Open Access Room temperature scanning Hall probe microscopy using GaAs/AlGaAs and Bi micro-hall probes(Elsevier Science B.V., 2002) Sandhu, A.; Masuda, H.; Oral, A.; Yamada, A.; Konagai, M.A room temperature scanning Hall probe microscope system utilizing GaAs/AlGaAs and bismuth micro-Hall probes was used for magnetic imaging of ferromagnetic domain structures on the surfaces of crystalline thin film garnets and permanent magnets. The Bi micro-Hall probes had dimensions ranging between 0.25 and 2.8μm2 and were fabricated using a combination of optical lithography and focused ion beam milling. The use of bismuth was found to overcome surface depletion effects associated with semiconducting micro-Hall probes. Our experiments demonstrated that Bi is a practical choice of material for fabricating sub-micron sized Hall sensors.Item Open Access Room-temperature scanning Hall probe microscope (RT-SHPM) imaging of garnet films using new high-performance InSb sensors(IEEE, 2002) Oral, Ahmet; Kaval, Murat; Dede, Münir; Masuda, H.; Okamoto, A.; Shibasaki, I.; Sandhu, A.The room-temperature scanning Hall probe microscopy (RT-SHPM) imaging of garnet films using high-performance InSb sensors was discussed. The high-performance InSb micro-Hall sensors were fabricated by optical lithography. It was found that the room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which was an order of magnitude better than GaAs-AlGaAs two-dimensional electron gas sensors.Item Open Access Ultra-low-cost near-infrared photodetectors on silicon(SPIE, 2015-02) Nazirzadeh, M. Amin; Atar, Fatih B.; Turgut, B. Berkan; Okyay, Ali KemalWe demonstrate Silicon-only near-infrared (NIR) photodetectors (sensitive up to 2000 nm) that meet large-scale ultralow-cost fabrication requirements. For the detection of infrared photons, we use metal nanoislands that form Schottky contact with Silicon. NIR photons excite plasmon resonances at metal nanoislands and plasmons decay into highly energetic charge carriers (hot electrons). These hot electrons get injected into Silicon (internal photoemission), resulting in photocurrent. Several groups have studied plasmonic nanoantennas using high resolution lithography techniques. In this work, we make use of randomly formed nanoislands for broad-band photoresponse at NIR wavelengths. We observe photoresponse up to 2000 nm wavelength with low dark current density about 50 pA/μm2. The devices exhibit photoresponsivity values as high as 2 mA/W and 600 μA/W at 1.3 μm and 1.55 μm wavelengths, respectively. Thin metal layer was deposited on low-doped n-type Silicon wafer. Rapid thermal annealing results in surface reconstruction of the metal layer into nanoislands. Annealing conditions control the average size of the nanoislands and photoresponse of the devices. An Al-doped Zinc Oxide (AZO) layer was deposited on the nanoislands using thermal atomic layer deposition (ALD) technique to acts as a transparent conductive oxide (TCO) and patterned using photolithography. AZO film creates electrical connection between the nanoislands and also makes a heterojunction to Silicon. Simple and scalable fabrication on Si substrates without the need for any sub-micron lithography or high temperature epitaxy process make these devices good candidates for ultra-low-cost broad-band NIR imaging and spectroscopy applications. © 2015 SPIE.