Browsing by Author "Olcum, Selim"
Now showing 1 - 12 of 12
Results Per Page
Sort Options
Item Open Access Bandwidth improvement in a cMUT array with mixed sized elements(IEEE, 2005-09) Bayram, Can; Olcum, Selim; Şenlik, Muhammed N.; Atalar, AbdullahA capacitive micromachined ultrasonic transducer (cMUT) is typically fabricated by concatenation of several cMUT cells with identical physical dimensions. If the membrane thickness is kept fixed, the radius of the cMUT determines the center frequency of operation. A smaller radius implies a greater center frequency. Therefore, it should be possible to put cMUTs with different sizes in parallel to get a larger bandwidth at the expense of gain. In this study, we investigate the optimization of the bandwidth characteristics of a cMUT by using mixed size cells. We designed two mixed size cMUT arrays with a predicted optimized fractional bandwidth value of about 155% at 5.4 MHz, and 146% at 8.8 MHz. These values are about 55% and 58% better than what can be achieved with a uniform size array at the corresponding center frequencies. There is almost no loss in the gain bandwidth product when two different sized cMUTs are used in parallel. There is about 9% increase in gain bandwidth product when three different sized cMUTs are used in parallel. It is shown, in this study, that gain bandwidth product and bandwidth can be enhanced by use of mixed size cMUT cells. © 2005 IEEE.Item Open Access Bandwidth, power and noise considerations in airborne cMUTs(IEEE, 2009-09) Şenlik, Muhammed N.; Olcum, Selim; Köymen, Hayrettin; Atalar, AbdullahCapacitive micromachined ultrasonic transducers (cMUTs) offer wider bandwidth in air due to their low mechanical impedances. The impedance mismatch between the air and transducer decreases with the smaller device dimensions increasing the bandwidth at the expense of the degradation in the transmit power and the receive sensitivity. In this work, the bandwidth of cMUT is optimized by increasing its radiation resistance. This is done by properly choosing the size of cMUT membranes and their placement within an array. This selection not only brings an improvement in the transmitted power when it is used as a transmitter, but also improves the noise figure when it is used as a receiver. A further improvement in the noise figure is possible when the cells are clustered and connected to separate receivers. ©2009 IEEE.Item Open Access An equivalent circuit for collapse operation mode of CMUTs(IEEE, 2010) Olcum, Selim; Yamaner F.Y.; Bozkurt, A.; Köymen, Hayrettin; Atalar, AbdullahCollapse mode of operation of the capacitive mi-cromachined ultrasonic transducers (CMUTs) was shown to be a very effective way for achieving high output pressures. However, no accurate model exists for understanding the mechanics and limits of the collapse mode. In this work, we extend the analyses made for CMUTs working in uncollapsed mode to collapsed mode. We have developed an equivalent nonlinear electrical circuit that can accurately simulate the mechanical behavior of a CMUT under any large signal electrical excitation. The static and dynamic deflections of a membrane predicted by the model are compared with the finite element simulations. The equivalent circuit model can estimate the static deflection within 1% and the transient behavior of a CMUT membrane within 3% accuracy. The circuit model is also compared to experimental results of pulse excitation applied to fabricated collapse mode CMUTs. The model is suitable as a powerful design and optimization tool for the collapsed as well as the uncollapsed case of CMUTs. © 2010 IEEE.Item Open Access Improved performance of cMUT with nonuniform membranes(IEEE, 2005-09) Şenlik, Muhammed N.; Olcum, Selim; Atalar, AbdullahWhen capacitive micromachined ultrasonic transducers are immersed in water, the bandwidth of the device is limited by the membrane's second resonance frequency. At this frequency no mechanical power to immersion medium can be transferred. We present a membrane shape to shift the second resonance frequency to a higher value. The structure consists of a very thin membrane at the outer rim with a rigid mass at the center. The stiffness of the central region moves the second resonance to a higher frequency. This membrane configuration is shown to work better in terms of gain and bandwidth as compared to conventional uniform membranes in both transmission and reception. © 2005 IEEE.Item Open Access A novel equivalent circuit model for CMUTs(IEEE, 2009-09) Oğuz, H. Kağan; Olcum, Selim; Senlik, Muhammed N.; Atalar, Abdullah; Köymen, HayrettinA nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately. ©2009 IEEE.Item Open Access An optical microcantilever with integrated grating coupler(IEEE, 2009-06) Olcum, Selim; Karademir, Ertuğrul; Taş. Vahdettin; Akça, İmran; Kocabaş, Aşkın; Atalar, Abdullah; Aydınlı, AydınlıIn this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.Item Open Access Optimizing CMUT geometry for high power(IEEE, 2010) Yamaner F.Y.; Olcum, Selim; Bozkurt, A.; Köymen, Hayrettin; Atalar, AbdullahCapacitive micromachined ultrasonic transducers (CMUTs) have demonstratedvarious advantages over piezoelectric transducers. However, current CMUT designsproduce low output pressures with high harmonic distortions. Optimizing thetransducer parameters requires an iterative solution and is too time consumingusing finite element (FEM) modelling tools. In this work, we present a method ofdesigning high output pressure CMUTs with relatively low distortion. We analyzethe behavior of a membrane under high voltage continuous wave operation using anonlinear electrical circuit model. The radiation impedance of an array ofCMUTs is accurately represented using an RLC circuit in the model. The maximummembrane swing without collapse is targeted in the transmit mode. Using SPICEsimulation of the parametric circuit model, we design the CMUT cell withoptimized parameters such as the membrane radius (a), thickness (tm),insulator thickness (ti) and gap height (tg). The modelalso predicts the amount of second harmonic at the output. To verify theaccuracy of the results, we built a FEM model with the same CMUT parameters. Thedesign starts by choosing ti for the given input voltage level.First, a is selected for the maximum radiation resistance of the array at theoperating frequency. Second, tm is found for the resonance at theinput frequency. Third, tg is chosen for the maximum membrane swing.Under this condition, a frequency shift in the resonant frequency occurs. Secondand third steps are repeated until convergence. This method results in a CMUTarray with a high output power and with low distortion. © 2010 IEEE.Item Open Access Radiation impedance and equivalent circuit for immersed CMUT array element(IEEE, 2006-10) Şenlik, Muhammed N.; Atalar, Abdullah; Köymen, Hayrettin; Olcum, SelimIn this paper, we present equivalent circuit for immersed capacitive micromachined ultrasonic transducers (cMUT), based on an accurate parametric model. We also present an accurate approximation for the radiation impedance cMUT. We develop a design approach for immersed cMUTs using the equivalent circuit. We demonstrate that the equivalent circuit predicts the performance of a cMUT array element composed of many cells in parallel. We investigate the applicability of the equivalent circuit in designing cMUT array elements. © 2006 IEEE.Item Open Access Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers in collapsed state(IEEE, 2011-10) Özgürlük, Alper; Atalar, Abdullah; Köymen, Hayrettin; Olcum, SelimRadiation impedance is one of the important parameters in designing efficient and wideband capacitive micro-machined ultrasonic transducer (CMUT) arrays. It determines how much acoustical power is generated in the surrounding medium given the membrane motion. Recently, considerable effort has been put to characterize the radiation impedance of CMUT arrays in conventional uncollapsed regime. However, the radiation impedance of an array of CMUT cells in collapsed state has not yet been investigated. To calculate the array radiation impedance in collapse mode, we first calculate the radiation impedance of a single cell CMUT. For the array case, the mutual impedances between the neighboring cells must also be taken into account.We consider an array of 7, 19, 37, and 61 cells placed in a hexagonal pattern and try to determine the radiation impedance for different degrees of collapse. We find that in the collapsed case the peak radiation resistance value is reached at higher kd values, where k is the wavenumber and d is the center to center cell spacing, compared to the uncollapsed regime.Item Open Access Stagger tuned cMUT array for wideband airborne applications(IEEE, 2006-10) Olcum, Selim; Atalar, Abdullah; Köymen Hayrtettin; Şenlik, Muhammed N.In this study, we explore the limits of cMUTs in air-borne applications. First we investigate the ways of increasing the bandwidth of a single cMUT cell in air. The effect of array operation is also considered in order to increase the radiation resistance seen by the transducer. We calculate the bandwidth of a stagger tuned cMUT array. It is shown in this paper that more than 60% bandwidth can be obtained by three staggered frequencies. © 2006 IEEE.Item Open Access Tunable surface plasmon resonance on an elastomeric substrate(Optical Society of American (OSA), 2009-05) Olcum, Selim; Kocabaş, Aşkın; Ertaş, Gülay; Atalar, Abdullah; Aydınlı, AtillaIn this study, we demonstrate that periods of metallic gratings on elastomeric substrates can be tuned with external strain and hence are found to control the resonance condition of surface plasmon polaritons. We have excited the plasmon resonance on the elastomeric grating coated with gold and silver. The grating period is increased up to 25% by applying an external mechanical strain. The tunability of the elastomeric substrate provides the opportunity to use such gratings as efficient surface enhanced Raman spectroscopy substrates. It's been demonstrated that the Raman signal can be maximized by applying an external mechanical strain to the elastomeric grating. © 2009 Optical Society of America.Item Open Access Wafer bonded capacitive micromachined underwater transducers(IEEE, 2009-09) Olcum, Selim; Oǧuz, Kaan; Şenlik, Muhammed N.; Yamaner F. Y.; Bozkurt, A.; Atalar, Abdullah; Köymen, HayrettinIn this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT element. The active area of the transducer is fabricated on top of a 3″ silicon wafer. The silicon wafer is bonded to a gold electrode coated glass substrate wafer 10 cm in diameter. Thermally grown silicon oxide layer is used as the insulation layer between membrane and substrate electrodes. Electrical contacts and insulation are made by epoxy layers. Single CMUT elements are tested in air and in water. Approximately 40% bandwidth is achieved around 25 KHz with a single underwater CMUT cell. Radiated pressure field due to second harmonic generation when the CMUTs are driven with high sinusoidal voltages is measured. ©2009 IEEE.