Browsing by Author "Khan, Talha Masood"
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Item Open Access Area-selective atomic layer deposition of noble metals: polymerized fluorocarbon layers as effective growth inhibitors(AVS Science and Technology Society, 2021-01-29) Deminskyi, Petro; Haider, Ali; Eren, Hamit; Khan, Talha Masood; Bıyıklı, NecmiThe increasingly complex nanoscale three-dimensional and multilayered structures utilized in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel substrate-selective material deposition approaches featuring bottom-up and self-aligned precision processing. Here, we demonstrate the area-selective atomic layer deposition (AS-ALD) of two noble metals, Pt and Pd, by using a plasma-polymerized fluorocarbon layer as growth inhibition surfaces. The contact angle, x-ray photoelectron spectroscopy (XPS), and scanning electron microscopy measurements were performed to investigate the blocking ability of polymerized fluorocarbon (CFx) layers against ALD-grown metal films. Both Pt and Pd showed significant nucleation delays on fluorocarbon surfaces. Self-aligned film deposition is confirmed using this strategy by growing Pt and Pd on the microscale lithographically patterned CFx/Si samples. CFx blocking layer degradation during ozone exposure was analyzed using XPS measurements, which confirmed the oxygen physisorption as the main responsible surface reaction with further hydroxyl group formation on the CFx surface. Our work reveals that the CFx layer is compatible with an ozone coreactant until the blocking polymer cannot withstand oxygen physisorption. Our results could potentially be used to investigate and develop radical-assisted AS-ALD processes for a wider selection of materials.Item Open Access Beam steering in a half-frequency driven airborne CMUT transmitter array(IEEE Computer Society, 2019) Khan, Talha Masood; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, HayrettinAn airborne Capacitive Micromachined Ultrasonic Transducer (CMUT) transmit array was designed using electromechanical modelling for unbiased airborne operation. The array elements are designed for maximum swing at 10V p-p unbiased drive, whereas conventional practice is to bias CMUT close to the collapsed voltage to achieve higher swing. The devices were fabricated using a customized single photolithographic process with a combination of wet and dry etching. The wafer level fabrication enabled the usage of 2x2 and 3x3 arrays. Driving CMUTs in an unbiased mode at half frequency drives the ‘static pressure’ depressed silicon membrane at a larger swing without letting it collapse. The 2x2 array displays 3.375 kHz bandwidth when characterized in air. The phase and amplitude differences due to the dispersion of resonance frequencies of the elements are compensated for beamformed and beamsteered airborne operation.Item Open Access Design, fabrication and operation of a very high intensity CMUT transmit array for beam steering applications(Bilkent University, 2020-12) Khan, Talha MasoodSeveral studies have reported airborne ultrasound transmission systems focused on achieving beamforming. However, beam steering and beamforming for capacitive micromachined ultrasonic transducers (CMUTs) at high intensity remains to be accomplished. CMUTs, like other ultrasonic transducers, incorporate a loss mechanism to obtain a wide bandwidth. They are restricted to a limited amount of plate swing due to the gap between the radiating plate and the bottom electrode, along with a high dc bias operation. CMUTs can be designed to produce high-intensity ultrasound by employing an unbiased operation. This mode of operation allows the plate to swing the entire gap without collapsing, thus enabling higher intensity. In this study, we use an equivalent circuit-based model to design unbiased CMUT arrays driven at half the mechanical frequency. This model is cross verified using finite element analysis (FEA). CMUT arrays are produced in multiple configurations using a customized microfabrication process that involves anodic wafer bonding, a single lithographic mask, and a shadow mask. We use impedance measurements to characterize the microfabricated devices. We experimentally obtained the highest reported intensity using a microfabricated 2×2 CMUT array driven at resonance in a pulsed configuration. This array is also capable of beam steering and beamforming at a high intensity such that it can steer the entire half-space. The beam obtained from the array is in excellent agreement with the theoretical predictions. The amplitude and phase compensation for the devices remain constant that makes these arrays attractive for applications involving park assist, gesture recognition, and tactile displays.Item Open Access High-Intensity airborne CMUT transmitter array with beam steering(IEEE, 2020) Khan, Talha Masood; Taşdelen, Akif Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, HayrettinA 2×2 high-intensity CMUT transmit array that is capable of two-dimensional beam steering is presented. The device uses an ac drive voltage at half the ultrasound frequency without any dc bias, enabling the usage of the entire gap height. The device is designed using a large signal equivalent model approach. A fabrication method that requires a single lithographic mask has been used. The fabricated devices are operated at 76 kHz to beam steer at various angles. An equivalent element pressure of 144 dB// 20 μ Pa at the transducer surface was measured. The entire half-space can be steered without any sidelobes and the beam obtained from the array is in excellent agreement with the theoretical predictions. [2020-0253]Item Open Access Optical characterization of high and low resistive silicon samples suitable for reconfigurable antenna design(Wiley Periodicals, Inc., 2018) Ali, A.; Topalli, K.; Ramzan, M.; Khan, Talha Masood; Altıntaş, Ayhan; Colantonio, P.Highly resistive (HR) silicon (Si) can behave as a switch when illuminated by optical source of suitable wavelength. Different reconfigurable passive structures, such as filters, waveguides, and antennas, can be constructed using such silicon switches. This letter presents experimental characterization of high and low resistive (HR & LR) silicon for switching application. In the experiment, HR Si is modeled on a switched transmission line by halogen lamp and a laser source. The experiment of utilizing halogen lamp for Si switch characterization is cost‐effective and can assist engineers in designing reconfigurable antennas. In future, this experiment could be utilized in designing novel reconfigurable antennas.Item Open Access Optically reconfigurable planar monopole antenna for cognitive radio application(Wiley Periodicals, Inc., 2019) Ali, A.; Topalli, K.; Ramzan, M.; Alibakhshikenari, M.; Khan, Talha Masood; Altıntaş, Ayhan; Colantonio, P.Frequency reconfigurable antenna is one of the important elements needed for cognitive radio application. Such antenna can be designed using highly resistive (HR) silicon (Si) operating as an optical switch. This letter presents a novel frequency reconfigurable planar monopole antenna suitable for cognitive radio application. The antenna is designed using HR Si working as an optical switch. The main idea behind the design of antenna is the redistribution of surface current on the antenna while changing the state of Si switches optically from high resistance to low resistance. The antenna is highly compact and uses only two switches for multiband reconfiguration. It is switchable on 1.9 GHz, 2.75 GHz, 3.7 GHz, 4.1 GHz, 4.6 GHz, 4.8 GHz, and 7.6 to 11 GHz frequency bands. Simulated and measured results are presented for the antenna. To the best of authors knowledge, this is the first multiband optically reconfigurable planar monopole antenna.Item Open Access A performance-enhanced planar Schottky diode for Terahertz applications: an electromagnetic modeling approach(Cambridge University Press, 2017) Ghobadi, Amir; Khan, Talha Masood; Celik, Ozan Onur; Biyikli, Necmi; Okyay, Ali Kemal; Topalli, KaganIn this paper, we present the electromagnetic modeling of a performance-enhanced planar Schottky diode for applications in terahertz (THz) frequencies. We provide a systematic simulation approach for analyzing our Schottky diode based on finite element method and lumped equivalent circuit parameter extraction. Afterward, we use the developed model to investigate the effect of design parameters of the Schottky diode on parasitic capacitive and resistive elements. Based on this model, device design has been improved by deep-trench formation in the substrate and using a closed-loop junction to reduce the amount of parasitic capacitance and spreading resistance, respectively. The results indicate that cut-off frequency can be improved from 4.1 to 14.1 THz. Finally, a scaled version of the diode is designed, fabricated, and well characterized to verify the validity of this modeling approach.Item Open Access Terahertz Bandpass Frequency Selective Surfaces on Glass Substrates Using a Wet Micromachining Process(Springer New York LLC, 2017) Ramzan, Mehrab; Khan, Talha Masood; Bolat, Sami; Nebioglu, Mehmet Ali; Altan, Hakan; Okyay, Ali Kemal; Topallı, KağanThis paper presents terahertz (THz) frequency selective surfaces (FSS) implemented on glass substrate using standard microfabrication techniques. These FSS structures are designed for frequencies around 0.8 THz. A fabrication process is proposed where a 100-μm-thick glass substrate is formed through the HF etching of a standard 500-μm-thick low cost glass wafer. Using this fabrication process, three separate robust designs consisting of single-layer FSS are investigated using high-frequency structural simulator (HFSS). Based on the simulation results, the first design consists of a circular ring slot in a square metallic structure on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of approximately 0.07 THz, which remains nearly constant till 30° angle of incidence. The second design consists of a tripole structure on top of a 100-μm-thick Pyrex glass substrate with 65% transmission bandwidth of 0.035 THz, which remains nearly constant till 30° angle of incidence. The third structure consists of a triangular ring slot in a square metal on top of a 100-μm-thick Pyrex glass substrate with 70% transmission bandwidth of 0.051 THz, which remains nearly constant up to 20° angle of incidence. These designs show that the reflections from samples can be reduced compared to the conventional sample holders used in THz spectroscopy applications, by using single layer FSS structures manufactured through a relatively simple fabrication process. Practically, these structures are achieved on a fabricated 285-μm-thick glass substrate. Taking into account the losses and discrepancies in the substrate thickness, the measured results are in good agreement with the electromagnetic simulations. © 2017, Springer Science+Business Media New York.Item Open Access Tunable Q matching networks for capacitive ultrasound transmitters(Springer New York LLC, 2021-05-06) Khan, M.; Khan, Talha MasoodAirborne capacitive micromachined ultrasonic transducers (CMUTs) have predominantly large input capacitive reactance with small series radiation resistance. To maximize the acoustic power radiation at resonance we employ low cost LC matching networks between the low output impedance driving source and CMUT transducer. Conventional LC networks, including pi and T-network topologies are employed to provide a high-Q match. An important free parameter that controls the bandwidth of match in pi and T-networks is the center impedance. Since a simple pi-network can be formed from two basic L-sections, the center impedance of two L-sections provides control over the bandwidth of match. Hence these are tunable-Q matching networks. We use the lumped circuit model of CMUT to derive the input impedance of CMUT at resonance. At resonance the lumped equivalent circuit of transducer can be reduced to a series RC circuit consisting of radiation resistance and transducer’s equivalent capacitance only. From the input impedance of CMUT we determine the lumped inductance and capacitances of various LC matching networks. The aim of these matching networks is to cancel the large input capacitive reactance of CMUT cell and to match the cell’s radiation resistance to source resistance at resonance. We report significant improvement in the radiated power when CMUT is driven at resonance using the proposed matching schemes.