Browsing by Author "Ölçüm, Selim"
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Item Open Access Calculation of transformer ratio in mason's equivalent circuit for cMUTs(IEEE, 2006) Ölçüm, Selim; Atalar, Abdullah; Köymen, Hayrettin; Şenlik, Muhammed NiyaziWe present a new method to calculate the transformer ratio of a cMUT in Mason's Equivalent circuit model. The effect of the spring softening capacitance is also included in the analysis. We use the existing turns ratio calculation methods as a starting point to calculate the force-voltage ratio at the secondary of the transformer and the input port of the circuit. We use this ratio and the capacitances in the Mason's circuit to find the actual turns ratio. Different methods are discussed for the calculation of the equivalent circuit parameters. We show that the transformer ratio has a bounded maximum at collapse voltage. We also investigate the effect of electrode size on the transformer ratio. Transformer ratio decreases with decreasing electrode size.Item Open Access Computer-controlled characterization of high-voltage, high-frequency SiC devices?(IEEE, 2006) Ortiz-Rodriguez, J. M.; Hefner, A. R.; Berning, D.; Hood, C.; Ölçüm, SelimA software-based high-voltage curve tracer application for SiC device characterization is presented. This flexible application interface is developed to define testing parameters needed to control the hardware of a custom-made 25 kV-capable SiC characterization test bed. Data acquisition is controlled for optimum resolution, and I-V characterization is computed by means of a user-defined time interval based on the shape of the applied power pulses. Both voltage and current waveforms are displayed for each data point captured to allow the user to observe transient effects. Additionally, the software allows archiving some or all of these transient waveforms. Acquired results are shown to demonstrate functionality and flexibility of the new system.Item Open Access Design and implementation of capacitive micromachined ultrasonic transducers for high power(IEEE, 2011) Yamaner F.Y.; Ölçüm, Selim; Bozkurt, A.; Köymen, Hayrettin; Atalar, AbdullahCapacitive micromachined ultrasonic transducers (CMUTs) have a strong potential to compete piezoelectric transducers in high power applications. In a CMUT, obtaining high port pressure competes with high particle velocity: a small gap is required for high electrostatic force while particle displacement is limited by the gap height. On the other hand, it is shown in [1] that CMUT array exhibits radiation impedance maxima over a relatively narrow frequency band. In this paper, we describe a design approach in which CMUT array elements resonate at the frequency of maximum impedance and have gap heights such that the generated electrostatic force in uncollapsed mode, can sustain particle displacement peak amplitude up to the gap height. The CMUT parameters are optimized for around 3 MHz of operation, using both a SPICE model and FEM. The optimized parameters require a thick membrane and low gap heights to get maximum displacement without collapsing membrane during the operation. We used anodic bonding process to fabricate CMUT arrays. A conductive 100 μm silicon wafer is bonded to a glass wafer. Before the bonding process, the silicon wafer is thermally oxidized to create an insulating layer which prevents break down in the operation. Then, the cavities are formed on the insulating layer by a wet etch. The gap height is set to 100 nm. Meanwhile, the glass wafer is dry etched by 120 nm and the etched area is filled by gold evaporation to create the bottom electrodes. The wafers are dipped into piranha solution and bonding process is done afterwards. The fabricated CMUTs are tested in an oil tank. To eliminate the DC voltage which may cause charging problem in the operation, we tried to drive the CMUT array with large continuous wave signals at half of the operating frequency. We observed 1MPa peak to peak pressure with -23 dB second harmonic at the surface of the array (Fig. 1). The proposed design further extends the operation of CMUTs. Observing low harmonic distortions at high output pressure levels, without any charging problem, make CMUT a big candidate for high power applications. © 2011 IEEE.Item Open Access Design charts to maximize the gain-bandwidth product of capacitive micromachined ultrasonic transducers(IEEE, 2005) Ölçüm, Selim; Şenlik, Muhammed Niyazi; Bayram, Can; Atalar, AbdullahIn this work we define a performance measure for capacitive micromachined ultrasonic transducers (cMUT) in the form of a gain-bandwidth product to investigate the conditions that optimize the gain and bandwidth with respect to device dimensions, electrode size and electrical termination resistance. For the transmit mode, we define the figure of merit as the pressure-bandwidth product. Fully-metallized membranes achieve a higher pressure-bandwidth product compared to partially metallized ones. It is shown that the bandwidth is not affected by the electrode size in the transmit mode. In the receive mode, we define the figure of merit as the gain-bandwidth product. We show in this case that the figure of merit can be maximized by optimizing the electrode radius. We present normalized charts for designing an optimum cMUT cell at the desired frequency with a given bandwidth for transmit or receive modes. The effect of spurious capacitance and liquid loading effect are considered. Design examples are given to clarify the use of these charts.Item Open Access Experimental characterization of capacitive micromachined ultrasonic transducers(IEEE, 2007) Ölçüm, Selim; Atalar, Abdullah; Köymen, Hayrettin; Oğuz, Kağan; Şenlik, Muhammed N.In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.