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Growth and characterization of nanocrystalline SrTiOx films: room temperature deposition using RF sputtering system in a pure argon environment
(Institute of Physics Publishing, 2017-05)
We report a comprehensive description of the structure, optical and electrical properties of asdeposited and annealed SrTiOx (STO) thin films. Nanocrystalline STO films were deposited on p-type Si (1 0 0) and UV-grade fused ...