Design and characterization of a micro mechanical test device
Author(s)
Advisor
Akay, AdnanDate
2016-08Publisher
Bilkent University
Language
English
Type
ThesisItem Usage Stats
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Abstract
Devices with micro- and nano- scale components are becoming more commonplace
and demand for better quantification of the properties such as Young's modulus,
stiffness, and damping of small-scale components is increasing. Since these properties
can differ significantly from their bulk values, their direct measurements
using a micro mechanical test device is offered in the thesis. The micro-scale test
device described in this thesis consists of a platform that also includes subsystems
to measure stress and strain, actuation, sample fabrication and grippers to mount
the samples.
A notch-
exure based monolithic structure is used for the device platform to
provide high-resolution precise motion. A piezoelectric actuator, a force transducer,
and a vibrometer are used for actuation, force measurement and velocity
measurement, respectively.
Finite element analyses and experiments are carried out in order to characterize
the apparatus as a micro mechanical test device. Static, time-dependent cases are
analyzed and its eigenfrequencies are determined. Required calibrations and drift
analysis of instruments are conducted. Force and velocity relations are obtained,
and results are evaluated for linearity and repeatability. Finally, operating range
of proposed device is determined for use as a micro mechanical test device.