Browsing Dept. of Mechanical Engineering - Master's degree by Author "Arı, Atakan Bekir"
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Design, fabrication, and applications of multi-mode nanoelectromechanical systems Arı, Atakan Bekir (Bilkent University, 2017-07)Miniaturization of systems allowed wide spread consumer use of microelectronics, integrated circuits and MEMS based sensors. Thanks to the advancement in microfabrication methods, it is possible to build structures with ...