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    • Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition 

      Ozgit, C.; Kayaci F.; Donmez I.; Cagatay, E.; Uyar, T.; Biyikli, N. (2012)
      Al 2O 3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum ...