Browsing Institute of Materials Science and Nanotechnology (UNAM) by Keywords "IC"
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RF-MEMS load sensors with enhanced Q-factor and sensitivity in a suspended architecture
(Elsevier, 2010-11-09)In this paper, we present and demonstrate RF-MEMS load sensors designed and fabricated in a suspended architecture that increases their quality-factor (Q-factor), accompanied with an increased resonance frequency shift ...