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Analytic modeling of loss and cross-coupling in capacitive micromachined ultrasonic transducers
(IEEE, Piscataway, NJ, United States, 1998)
The structural loss mechanism of capacitive micromachined ultrasonic transducer (cMUT) is investigated using finite element analysis and the normal mode theory. A single micromachined transducer membrane on an infinite ...
An equivalent circuit for collapse operation mode of CMUTs
Collapse mode of operation of the capacitive mi-cromachined ultrasonic transducers (CMUTs) was shown to be a very effective way for achieving high output pressures. However, no accurate model exists for understanding the ...
An equivalent circuit model for transmitting capacitive micromachined ultrasonic transducers in collapse mode
The collapse mode of operation of capacitive micromachined ultrasonic transducers (CMUTs) was shown to be a very effective way to achieve high output pressures. However, no accurate analytical or equivalent circuit model ...
Optimizing CMUT geometry for high power
Capacitive micromachined ultrasonic transducers (CMUTs) have demonstratedvarious advantages over piezoelectric transducers. However, current CMUT designsproduce low output pressures with high harmonic distortions. Optimizing ...
CMUT array element in deep-collapse mode
Collapse and deep-collapse mode of operations have boosted the pressure outputs of capacitive micromachined ultrasonic transducers (CMUTs) considerably. In this work, we demonstrate a CMUT element operating in the deep-collapse ...