Now showing items 1-4 of 4
Silicon micromachined ultrasonic immersion transducers
(A I P Publishing LLC, 1996-12-09)
Broadband transmission of ultrasound in water using capacitive, micromachined transducers is reported. Transmission experiments using the same pair of devices at 4, 6, and 8 MHz with a signal‐to‐noise ratio greater than ...
Interdigital cantilevers for atomic force microscopy
(A I P Publishing LLC, 1996-10)
We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...
Independent parallel lithography using the atomic force microscope
(A I P Publishing LLC, 1996-05)
Independent parallel features have been lithographically patterned with a 2×1 array of individually controlled cantilevers using an atomic force microscope. Control of the individual cantilevers was achieved with an ...
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
(A I P Publishing LLC, 1996-01)
Using an atomic force microscope (AFM) with a silicon cantilever partially covered with a layer of zinc oxide (ZnO), we have imaged in the constant force mode by employing the ZnO as both a sensor and actuator. The cantilever ...